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Three dimensional micro forming of thin film metallic glass cantilevers and its application for micro probes

薄膜金属玻璃悬臂梁三维微成形及其在微型探针中的应用

基本信息

批准号：
12355007
负责人：
SHIMOKOHBE Akira
金额：
$ 28.74万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-12355007/
关键词：
MEMS micromachining thin film amorphous metallic glass electrostatic actuator information instruments optical pickup

项目摘要

1. PurposesIn order to establish the new precision microforming methods of 3D thin film metallic glass (TFMG) cantilevers, this research examined the following items. (1) Fabrication of Pd-based and Zr-based TFMGs by RF-magnetron sputtering and Measurement of physical properties of the TFMGs, (2) Examination of 3D microforming method of TFMGs at the supercooled liquid region and its accuracy as well as repeatability, (3) Application of 3D TFMG cantilevers for micro probes which use in testing equipments of LSI.2. Results(1) Physical properties of the TFMGs are tested. As a consequence, the TFMGs have high elasticity, high strength and a suitable characteristic for a spring material. Pd_<76>Cu_6Si_<18> TFMG for low electrical resistivity is successfully fabricated. Electrical resistivity of the as-sputtered Pd_<76>Cu_6Si_<18> TFMG is 64 μΩcm. When annealed at 633 K for 2700 s, Pd_<76>Cu_6Si_<18> TFMG becomes partially crystallized, and electrical resistivity decreases to 46.5 μΩcm without inducing embrittlement.(2) Micromachining methods for the two- and three-dimensional microstructures of the TFMGs using softening in the SCLR are proposed. High precision bent or 90・ bent beams and 90・ twisted beams are fabricated.(3) Microprobes are fabricated by the above studies. The dimensions of the microprobe are 200μm high, 400μm long, 50μm wide and 5μm thick. The probes achieve less than 1 Ω contact resistance to Al pad and 1mN contact load. Moreover, it became evident that the probes have sufficient durability by three hundreds of thousands touchdown test.3. Future works(1) Developments of new TFMGs, (2) Measurements of TFMG size effect in tensile test and fatigue strength, (3) The application of the 3D microprobes to probe cards.

1. 目的为了建立 3D 薄膜金属玻璃 (TFMG) 悬臂梁的新型精密微成型方法，本研究检查了以下项目。 (1) 射频磁控溅射法制备Pd基和Zr基TFMG并测量其物理性能，(2) TFMG在过冷液体区域的3D微成形方法及其精度和重复性检验，(3) 3D TFMG悬臂梁在LSI测试设备中微探针中的应用。2.结果(1)测试了TFMG的物理性能。因此，TFMG具有高弹性、高强度和适合弹簧材料的特性。成功制备出低电阻率的Pd_<76>Cu_6Si_<18>TFMG。溅射后的Pd_<76>Cu_6Si_<18>TFMG的电阻率为64μΩcm。当在633 K下退火2700 s时，Pd_<76>Cu_6Si_<18> TFMG部分结晶，电阻率降至46.5 μΩcm，且没有引起脆化。(2)提出了利用SCLR软化对TFMG进行二维和三维微结构的微加工方法。制作了高精度弯曲或90°弯曲梁和90°扭转梁。(3)通过上述研究制作了微探针。微探针的尺寸为200μm高、400μm长、50μm宽和5μm厚。探针与铝焊盘的接触电阻小于 1 Ω，接触负载为 1 mN。而且，通过三十万次触地试验，证明探头具有足够的耐用性。 3．未来的工作(1) 新型 TFMG 的开发，(2) 拉伸试验和疲劳强度中 TFMG 尺寸效应的测量，(3) 3D 微探针在探针卡中的应用。