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Active Air Rotary Bearing

主动空气旋转轴承

基本信息

批准号：
02555026
负责人：
SHIMOKOHBE Akira
金额：
$ 8.9万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1991
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02555026/
关键词：
Air bearing Active bearing Active damping positioning Piezoelectric actuator Precision mechanisms Mechatronics 能動化

项目摘要

The aim of the research project was to establish the mechatronic air bearing which has following features : (1) Measurement and control of five degrees of freedom of the axis error motion, (2) Active improvement of the bearing stiffness and damping capability, and (3) Measurement and control of the absolute error motion of the axis.First, a measurement method of the absolute rotation accuracy of an axis and its profile error i. e. the roundness error was established. The method was proved using the active air journal bearing (AAJB) which could radially position the axis by piezoelectric actuators. The accuracy of both of measurements were 15nm.Secondly, in order to realize the absolute accuracy of the rotation motion, a control method was discussed of the position of the axis which had a profile error. The method was examined using the AAJB and the rotation accuracy less than 20nm at 750rpm was accomplished.Lastly, the active air rotary bearing (AARB) which could control five degrees of freedom of the axis error motion was designed and constructed. The bearing comprises of two AAJBs to control four degrees of freedom of the axis motion and an active air thrust bearing to control the thrust motion. The performance of the AARB was :(1) Control band width : 30OHz, Positioning resolution ; 15nm(2) Rotation accuracy at 45rpm ; radial motion, 15nm and inclination, 0.015arcsec(3) Static stiffness ; infinite

本研究项目的目的是建立机电一体化的空气轴承，具有以下特点：（1）五个自由度轴误差运动的测量与控制，（2）主动提高轴承刚度和阻尼能力，（3）轴绝对误差运动的测量与控制，首先一种轴的绝对回转精度及其轮廓度误差的测量方法。e.确定圆度误差。以主动空气径向轴承为例，验证了该方法的可行性。其次，为了实现旋转运动的绝对精度，讨论了存在轮廓误差的轴的位置控制方法。利用AAJB对该方法进行了验证，在750 rpm转速下实现了小于20 nm的旋转精度。最后，设计并制造了一种能够控制五个自由度轴向误差运动的主动空气旋转轴承（AARB）。该轴承由两个AAJB和一个主动空气推力轴承组成，AAJB用于控制轴向运动的四个自由度，主动空气推力轴承用于控制推力运动。AARB的主要性能指标为：（1）控制带宽：300 Hz，定位分辨率：15 nm;（2）旋转精度：45 rpm;径向运动：15 nm，倾角：0.015arcsec;（3）静态刚度：无限大;