Research of Multiple-Input and Multiple-Output Functional Devices by Means of Nanodot Array

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We proposed a new flexible logic device which has multi-outputs and multi-outputs by means of a nanodot array. We first confirmed the operation principle as a flexible logic device by simulation. Then, we actually fabricated Si nanodot-array devices, and demonstrated the higher functionalities that conventional devices have never had. In addition, we developed the metal-nanodot-array-formation techniques in order to achieve smaller nanodots.1. Simulation taking account of stochastic tunneling of single electronWe built a Monte-Carlo simulator in order to confirm the basic operation of the nanodot-array device as a flexible logic device.We clarified that the device operates as a multi-input logic gate whose function can be changed by the control gate voltage.2. Si nanodot-array device fabrication and the evaluation of their electrical characteristicsWe fabricated Si nanodot-array devices using conventional CMOS fabrication technology, in which the key processes are electron-beam lithogr … More aphy and thermal oxidation of Si. We made 2x2 nanodot arrays and attached two small input gates which coupled capacitively with nanodots in the array. Finally, we attached a big control gate on top of the device so as to be coupled with all the nanodots. We achieved the high functionality in which we can obtain all six important two-input logic functions by changing the control-gate voltage. We also achieved a possibility of an operation as a multi-input and multi-output device, which cannot be attained by the use of conventional devices.3. Metal-nanodot-array formationWe investigated fabrication technologies for getting small metal nanodot arrays which have sub-ten-nanometer dot sizes. We also investigated the arrays which use ferromagnetic metal dots. The device is expected as a spin-dependent tunneling device, in which the tunneling probability is changed by the coupling among the dots or gate voltage, which may enable us to use a new additional functionality. We achieved two-dimensional metal nanodot arrays which have a few nanometer-dot sizes. Less