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STABILIZATION ON PROCESS OF EXIMER LASER BY IN SITU MEASUREMENT OF ENERGY

能量原位测量稳定准分子激光过程

基本信息

批准号：
11555044
负责人：
FURUKAWA Yuji
金额：
$ 8.13万
依托单位：
TOKYO METROPOLITAN UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B).
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2000
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-11555044/
关键词：
Eximer Laser In-situ measurement Ablation Single crystal silicon エネルギ分布フォトン

项目摘要

Eximer laser that is in ultraviolet region processes materials without thermal reaction since photon energy is high in comparison with other laser such as carbonic acid gas and YAG.The process of eximer laser with optical-chemical reaction is referred to ablation. The eximer laser can sharply shape corner of hole. However energy of KrF eximer laser is unstable because of rust of gas and electrode. The energy value with respect to time has decreased and repeatability of processed shape has not been expected by using this process. It is possible to establish the micro process using eximer laser when the energy is controlled to be stable.In order to stabilize the energy value of laser, a feed back system that can perform in-situ measurement of energy is constructed in this study. Laser beam diameter becomes 1mm at energy meter through attenuator, which adjusts the energy value. Laser processes single crystal silicon because the purpose of this study is to establish method of process to fabricate micro-electro-mechanical systems. The laser beam is focused by a lens to becomes 120μm at the surface of silicon. Firstly we tried to stabilize the energy distribution using beam profiler. Secondly the energy with respect to time is controlled to be constant value using feedback control system consists of the energy meter and the attenuator built in a stepping motor. The laser energy can becomes stable when this feedback control system is used. Finally repeatability in terms of processed shape can be obtained through use of this control system.

准分子激光是一种紫外光区的激光，与其它激光如碳酸气、YAG相比，它的光子能量高，对材料进行加工时不发生热反应，而发生光化学反应的过程称为烧蚀。准分子激光可以对孔的角部进行尖锐的整形。然而KrF准分子激光器由于气体和电极的腐蚀，能量不稳定。相对于时间的能量值已经降低，并且通过使用该工艺，加工形状的可重复性没有预期。为了使准分子激光器的能量稳定，本研究设计了一套可实现能量在线测量的反馈系统，并利用该系统对激光器的能量进行了测量。激光束直径在能量计处通过衰减器变为1mm，衰减器调节能量值。激光加工单晶硅，因为本研究的目的是建立制造微机电系统的工艺方法。激光束通过透镜聚焦，在硅表面变成120μm。首先，我们试图稳定的能量分布，使用光束轮廓仪。其次，利用内置于步进电机中的能量计和衰减器组成的反馈控制系统，将能量相对于时间控制为恒定值。采用这种反馈控制系统，可以使激光能量稳定。最后，通过使用该控制系统，可以获得加工形状的重复性。