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On the Design of Precise Linear Motion Bearing Mechanism in Vacuum

真空精密直线运动轴承机构的设计

基本信息

批准号：
02555029
负责人：
FURUKAWA Yuji
金额：
$ 11.58万
依托单位：
Tokyo Metropolitan University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Developmental Scientific Research (B)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1992
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-02555029/
关键词：
Vacuum Friction Tribology Motion Accuracy Bearing Linear Motion トライボロジ

项目摘要

The purpose of this research is 1) to investigate the dry frictional behavior of a slider in vacuum and its effect on the motion accuracy, and 2) to propose a design procedure of a sliding mechanism. Here, t he goal of its performance is higher load capacity, longer stroke (meter order) and higher accuracy (micron meter order) than the conventional ones.The slider for experiment is made of stainless steel which dimensions are 90x120x20 (sliding face is 2. width, 120 mm length, 2 rows, contact pressure 39kPa) and was driven by a wire. The rail is also made of stainless steel and its length is 600 mm. Three gap sensors and 2-axes laser interferometry system were used to measure the slider's angular and linear motion during sliding. Frictional coefficient was measured by a strain gage attached on the driving shaft.As the experimental conditions, pressure were set as atmosphere, 1.3x10^<-4> and 1.3x10^<-5>. Pa and sliding speed was adjusted up to 40 mm/s. Under these conditions, the following was clarified.1) Coefficient of friction does not depend on sliding speed so much, however, the tendency is different. That is, in atmosphere the coefficient decrease with the speed increase, on the other hand in vacuum th e coefficient is increase.2) In vacuum, the mean value of coefficient of friction increase, however, the its scatter becomes small.3) After some cycles of slide, the coefficient of friction suddenly increase and sliders are locked.(adhesion).The motion accuracy did not necessarily depend on the coefficient of friction. Some good motion accuracy was observed. However, when the coefficient of friction scatter, the accuracy became low. After the adhesion has occurred, the accuracy became extremely low.According to the experimental results, some design guideline was studied.

本研究的目的在于探讨真空中滑块的干摩擦特性及其对运动精度的影响，并提出一种滑动机构的设计方法。实验用的滑块采用不锈钢材料制成，尺寸为90 × 120 × 20（滑动面为2. 5 × 120）。宽度，120 mm长，2排，接触压力39 kPa），并由线驱动。导轨也是不锈钢制成，长度为600 mm。使用三个间隙传感器和两轴激光干涉测量系统来测量滑块在滑动过程中的角运动和线性运动。实验条件为大气压、1.3 × 10 ~（-3）、<-4>1.3 × 10 ~（-3）<-5>。Pa，滑动速度调节至40 mm/s。在此条件下，得到如下结论：1）摩擦系数对滑动速度的依赖性不大，但变化趋势不同。在真空中，摩擦系数的平均值增大，但其离散性变小;在滑动循环数周后，摩擦系数突然增大，滑块被锁住.运动精度不一定取决于摩擦系数。观察到一些良好的运动精度。但当摩擦系数分散时，精度变低。根据实验结果，提出了一些设计准则。