Development of Ultraprecision ＆ Ultrafine Machining System for Fabricating Nano-Devices

用于制造纳米器件的超精密和超精细加工系统的开发

基本信息

批准号：
14102015
负责人：
SHINNO Hidenori
金额：
$ 61.82万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (S)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2006
项目状态：
已结题

项目摘要

The demand for fabrication of nano-devices has recently increased in the field of advanced science and engineering. In particular ; an ultraprecision machining with large work area has been required for producing functional elements with three-dimensional nano-structures. In order to meet such requirements, many studies related on the development of ultraprecision machine tool have been performed so far; while there have been only few academic literatures on such developments.In this research project, therefore, an ultraprecision and ultrafine machining system for fabricating nano-devices was newly developed and then the performances were evaluated through a series of ultraprecision machining experiments. The machining system developed in this project was of a perfect non-contact structure which could be design to minimize various error factors within the machine structure.The developed ultraprecision and ultrafine machining system based on a new design concept was constructed from the following fundamental structural modules :(1)An novel X-Y-θ planar motion aerostatic table system,(2)An air turbine-driven high speed aerostatic spindle system for nano-machining,(3)A vertical nano-motion table system equipped with innovate gravity compensator,(4)An effective thermal deformation control system with temperature control function of supply air,(5)An in-process ultraprecision machining status monitoring system with micro-sensor, and(6)A stable entire machine structure which was applied new materials to all of fundamental structural modules.Finally, the results of actual nano-machining experiments confirmed that the developed ultraprecision and ultrafine machining system provides remarkable performances and then is suitable for nano-machining of nano-devices.

在高级科学和工程领域，对制造纳米设备的制造需求增加了。尤其;对于具有三维纳米结构的功能元件，需要具有较大工作区域的超重新计算加工。为了满足此类要求，到目前为止，已经进行了许多有关超压缩机床开发的研究。尽管在这项研究项目中，虽然只有很少的学术文献。因此，新开发了用于制造纳米设备的超压缩和超级加工系统，然后通过一系列的超压缩加工实验评估了性能。根据以下基本结构模块构建了开发的超压印和超级加工系统，基于新的设计概念：（1）一种新型的X-Y-θ平面运动空气表台系统，（2）空气涡轮机驱动的高速空气螺旋螺旋系统，用于纳米缓存，（3）垂直纳米计量系统等效型的垂直纳米计量系统等效型（3）4个垂直型固定式的固定型固定型（4）（3）借助供应空气的温度控制功能，（5）具有微传感器的过程中的超压缩机械状态监控系统，以及（6）稳定的整个机器结构，将新材料应用于所有基本的结构模块，从而在所有基本的结构模块上都应用。实际上，实际的纳米结构的结果证实了实际的纳米式实验，并确认了开发的超级精加工和超级精加工的累积性能，并且超出了超级精加工，超级精加工的结果是纳米设备。