Development of Ultraprecision ＆ Ultrafine Machining System for Fabricating Nano-Devices

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The demand for fabrication of nano-devices has recently increased in the field of advanced science and engineering. In particular ; an ultraprecision machining with large work area has been required for producing functional elements with three-dimensional nano-structures. In order to meet such requirements, many studies related on the development of ultraprecision machine tool have been performed so far; while there have been only few academic literatures on such developments.In this research project, therefore, an ultraprecision and ultrafine machining system for fabricating nano-devices was newly developed and then the performances were evaluated through a series of ultraprecision machining experiments. The machining system developed in this project was of a perfect non-contact structure which could be design to minimize various error factors within the machine structure.The developed ultraprecision and ultrafine machining system based on a new design concept was constructed from the following fundamental structural modules :(1)An novel X-Y-θ planar motion aerostatic table system,(2)An air turbine-driven high speed aerostatic spindle system for nano-machining,(3)A vertical nano-motion table system equipped with innovate gravity compensator,(4)An effective thermal deformation control system with temperature control function of supply air,(5)An in-process ultraprecision machining status monitoring system with micro-sensor, and(6)A stable entire machine structure which was applied new materials to all of fundamental structural modules.Finally, the results of actual nano-machining experiments confirmed that the developed ultraprecision and ultrafine machining system provides remarkable performances and then is suitable for nano-machining of nano-devices.