Development of Ultraprecision ＆ Ultrafine Machining System for Fabricating Nano-Devices

近年来，在先进科学和工程领域对纳米器件的制造需求不断增加。特别地；制备具有三维纳米结构的功能元件需要大加工面积的超精密加工。为了满足这种要求，迄今为止已经进行了许多与超精密机床开发相关的研究；然而，关于这种发展的学术文献很少。因此，本研究项目开发了一种用于纳米器件制造的超精密和超细加工系统，并通过一系列的超精密加工实验对其性能进行了评价。本项目开发的加工系统具有完美的非接触结构，可以设计成最小化机器结构内的各种误差因素。基于新设计理念所开发的超精密超细加工系统由以下基本结构模块构成：(1)新型X-Y-θ平面运动空气静压工作台系统，(2)空气涡轮驱动的纳米加工高速空气静压主轴系统，(3)配备创新重力补偿器的垂直纳米运动工作台系统，(4)具有送风温控功能的有效热变形控制系统，(5)过程中控制系统采用微传感器的超精密加工状态监测系统；(6)整机结构稳定，基本结构模块均采用新材料。最后，通过实际的纳米加工实验，验证了所开发的超精密和超细加工系统具有良好的性能，适用于纳米器件的纳米加工。

The demand for fabrication of nano-devices has recently increased in the field of advanced science and engineering. In particular ; an ultraprecision machining with large work area has been required for producing functional elements with three-dimensional nano-structures. In order to meet such requirements, many studies related on the development of ultraprecision machine tool have been performed so far; while there have been only few academic literatures on such developments.In this research project, therefore, an ultraprecision and ultrafine machining system for fabricating nano-devices was newly developed and then the performances were evaluated through a series of ultraprecision machining experiments. The machining system developed in this project was of a perfect non-contact structure which could be design to minimize various error factors within the machine structure.The developed ultraprecision and ultrafine machining system based on a new design concept was constructed from the following fundamental structural modules :(1)An novel X-Y-θ planar motion aerostatic table system,(2)An air turbine-driven high speed aerostatic spindle system for nano-machining,(3)A vertical nano-motion table system equipped with innovate gravity compensator,(4)An effective thermal deformation control system with temperature control function of supply air,(5)An in-process ultraprecision machining status monitoring system with micro-sensor, and(6)A stable entire machine structure which was applied new materials to all of fundamental structural modules.Finally, the results of actual nano-machining experiments confirmed that the developed ultraprecision and ultrafine machining system provides remarkable performances and then is suitable for nano-machining of nano-devices.