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Development of Ultraprecision ＆ Ultrafine Machining System for Fabricating Nano-Devices

用于制造纳米器件的超精密和超精细加工系统的开发

基本信息

批准号：
14102015
负责人：
SHINNO Hidenori
金额：
$ 61.82万
依托单位：
Tokyo Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (S)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2006
项目状态：
已结题

项目摘要

The demand for fabrication of nano-devices has recently increased in the field of advanced science and engineering. In particular ; an ultraprecision machining with large work area has been required for producing functional elements with three-dimensional nano-structures. In order to meet such requirements, many studies related on the development of ultraprecision machine tool have been performed so far; while there have been only few academic literatures on such developments.In this research project, therefore, an ultraprecision and ultrafine machining system for fabricating nano-devices was newly developed and then the performances were evaluated through a series of ultraprecision machining experiments. The machining system developed in this project was of a perfect non-contact structure which could be design to minimize various error factors within the machine structure.The developed ultraprecision and ultrafine machining system based on a new design concept was constructed from the following fundamental structural modules :(1)An novel X-Y-θ planar motion aerostatic table system,(2)An air turbine-driven high speed aerostatic spindle system for nano-machining,(3)A vertical nano-motion table system equipped with innovate gravity compensator,(4)An effective thermal deformation control system with temperature control function of supply air,(5)An in-process ultraprecision machining status monitoring system with micro-sensor, and(6)A stable entire machine structure which was applied new materials to all of fundamental structural modules.Finally, the results of actual nano-machining experiments confirmed that the developed ultraprecision and ultrafine machining system provides remarkable performances and then is suitable for nano-machining of nano-devices.

最近，在先进科学和工程领域中，对纳米器件制造的需求有所增加。特别是;为了生产具有三维纳米结构的功能元件，需要具有大工作面积的超精密加工。为了满足这一需求，目前国内外对超精密机床的发展进行了大量的研究，但相关的学术文献还很少，因此本研究课题开发了一种用于纳米器件制造的超精密超微细加工系统，并通过一系列的超精密加工实验对其性能进行了评价。本项目开发的加工系统是一种完美的非接触式结构，可以设计成使机器结构中的各种误差因素最小化。基于新的设计理念开发的超精密和超细加工系统由以下基本结构模块构成：（1）一种新型的X-Y-θ平面运动空气静压工作台系统;（2）一种用于纳米加工的高速空气静压主轴系统;（3）一种具有创新重力补偿器的垂直纳米运动工作台系统;（4）具有送风温度控制功能的有效的热变形控制系统;（5）具有微型传感器的超精密加工状态在线监测系统;（6）所有基本结构模块均采用新材料的稳定的整机结构。实际的纳米-加工实验表明，所研制的超精密、超细加工系统具有良好的加工性能，适用于纳米材料的纳米加工。装置.