A Newly Developed Compact Tree-Dimensional Profile Measuring System "Compact Nano-Profiler"

新开发的紧凑型三维轮廓测量系统“Compact Nano-Profiler”

• 批准号: 21246026
• 负责人: SHINNO Hidenori
• 金额: $ 27.21万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 2009
• 资助国家: 日本
• 起止时间: 2009 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-21246026/
• 关键词: ナノ計測; 三次元計測; コンパクト構造; ナノ形状計測; プローブシステム; トンネル電流; 原子間力; ナノ運動制御; Nano-profiler; Nano-measuring; Nano-motion control; Three-dimensional profile; Scanning Tunneling Microscopy; Nano-geometry; Measuring machine; Probe

This research developed a compact type three-dimensional profile measuring system named "Compact Nano-Profiler" which achieve both a measuring range of several 10 mm and a measurement resolution of 1 nm. By combining a compact XY planar nano-motion table system, a vertical nano-motion platform with gravity compensating function and an ultra-fine probing system, the compact nano-profiler with a dynamically and thermally stable structure was newly developed and then the performances of the system were evaluated. As a result, performance evaluation results confirmed that the developed measuring system has both a positioning resolution of 1 nm and high measuring stability. In addition, a series of measuring test results confirmed the developed measuring system has a high reproducibility of nanometer scale measurement. Furthermore, use of an AFM probing system made it possible to effectively measure an insulator such as glass lens, ceramics, etc.

本研究开发了一种紧凑型三维轮廓测量系统“紧凑型纳米轮廓仪”，其测量范围可达10 mm，测量分辨率可达1 nm。将紧凑型XY平面纳米运动平台系统、具有重力补偿功能的垂直纳米运动平台和超精细探测系统相结合，研制了具有动态热稳定结构的紧凑型纳米轮廓仪，并对系统的性能进行了评价。结果表明，所研制的测量系统具有1 nm的定位分辨率和较高的测量稳定性。此外，一系列测量试验结果证实了所研制的测量系统具有较高的纳米级测量重现性。此外，AFM探测系统的使用使有效测量玻璃透镜、陶瓷等绝缘体成为可能。

项目成果

AFMプローブを用いた三次元形状計測システム

使用 AFM 探针的 3D 形状测量系统

• 发表时间: 2011
• 期刊: 日本機械学会論文集
• 作者: 綾田翔;澤野宏;吉岡勇人;新野秀憲
• 通讯作者: 新野秀憲

On-Machine Shape Measuring System by Means of Optical Stylus for Nano-Machining

用于纳米加工的光学触针机上形状测量系统

• 发表时间: 2010
• 作者: H.Sawano;M.Takahashi;H.Yoshioka;H.Shinno;K.Mitsui
• 通讯作者: K.Mitsui

On-Machine Optical Surface Profile Measuring System for Nano-Machining

• DOI: 10.20965/ijat.2011.p0369
• 发表时间: 2011-05
• 期刊: Int. J. Autom. Technol.
• 作者: H. Sawano;Motohiro Takahashi;Hayato Yoshioka;H. Shinno;K. Mitsui

Chapter 4, Various Remedies for Reduction of Thermal Deformation, Thermal Deformation in Machine Tools(Edited by Yoshimi Ito)

第4章 减少热变形的各种补救措施、机床的热变形（伊藤吉美编）

• 发表时间: 2010
• 作者: M.Kaneko;Y.Takagi;K.Kawashima;T.Yamaguchi;Y.Nanishi;Hidenori Shinno
• 通讯作者: Hidenori Shinno

3次元計測装置,ナノからミリまでカバー,東工大精密位置制御で高精度,日刊工業新聞朝刊, 2010年8月24日,科学技術・大学欄.新聞発表

3D测量装置，涵盖从纳米到毫米，东京工业大学精密位置控制的高精度，日刊工业新闻早报，2010年8月24日，科学技术/大学专栏。