A Newly Developed Compact Tree-Dimensional Profile Measuring System "Compact Nano-Profiler"

本研究开发了一种紧凑型三维轮廓测量系统，名为“紧凑型纳米轮廓仪”，实现了测量范围为几十毫米和测量分辨率为1纳米。通过将紧凑型XY平面纳米运动平台系统、具有重力补偿功能的垂直纳米运动平台和超精细探测系统相结合，研制了一种具有动态和热稳定结构的紧凑型纳米轮廓仪，并对其性能进行了评价。性能评价结果表明，该测量系统具有1 nm的定位分辨率和较高的测量稳定性。此外，一系列的测量测试结果证实了所开发的测量系统具有较高的纳米尺度测量的重现性。此外，AFM探测系统的使用使得可以有效地测量绝缘体如玻璃透镜、陶瓷等。

This research developed a compact type three-dimensional profile measuring system named "Compact Nano-Profiler" which achieve both a measuring range of several 10 mm and a measurement resolution of 1 nm. By combining a compact XY planar nano-motion table system, a vertical nano-motion platform with gravity compensating function and an ultra-fine probing system, the compact nano-profiler with a dynamically and thermally stable structure was newly developed and then the performances of the system were evaluated. As a result, performance evaluation results confirmed that the developed measuring system has both a positioning resolution of 1 nm and high measuring stability. In addition, a series of measuring test results confirmed the developed measuring system has a high reproducibility of nanometer scale measurement. Furthermore, use of an AFM probing system made it possible to effectively measure an insulator such as glass lens, ceramics, etc.