Establishment of novel microscale surface treatment/processing technology with ultra-small plasma beam

在本项目中，我们建立了一种新型的微型等离子体束表面处理/加工技术。(1)利用直流、交流和甚高频等离子体发生器产生2mm ~ 25μmφ的各种类型的小束等离子体。特别是本课程组提出并开发的热电子增强微米级等离子体（TEMP），使制备小尺寸等离子体变得容易。典型的性能有：(A)小尺寸（2mm ~ 25μmφ）。(B)多探针（6个）。(C)低持续功率（1W）。(2)对不同等离子体（气体：N2、O2、Ar，功率：0.1 ~ 30w，气体流量：0 ~ 1000sccm，压力：7600 ~ 40torr）进行了发射光谱表征，得到了不同的等离子体状态，如热等离子体、冷等离子体和界面等离子体的典型温度。例如，在760torr时，Ar气的气体温度约为4000-5000K。(3)利用这些超小型等离子体束，我们成功地完成了以下各种微加工：(A)金属（Fe, Al, Cu）的熔化。(B)氧化。(C)沉积（C系）。特别是，由于匹配性能的进步，我们可以在远离等离子体产生电源的地方产生这样的小等离子体并进行上述的表面处理。

In this project, we performed an establishment of novel microscale surface treatment/processing technology with ultrta-small plasma beam as followed.(1) We generated various type small beam plasmas ranging from 2mm to 25μmφusing dc, ac, and VHF plasma generator. Especially, thermoelectron enhancede micrometer-scale plasma (TEMP), which had been proposed and developed by our group made it easy to generate a small size plasma. Examples of typical performances were as follows: (A) small size (from 2mm to 25μmφ). (B) multi probes (six). (C) low sustain power (1W).(2) The various plasmas (gas : N2, O2, Ar, power : 0.1-30W, gas flow : 0-1000sccm, preasure : 7600-40torr) were characterized by optical emission spectroscopy, which shows the various plasma conditions, such as typical plasma temperatures of three plasmas, namely as thermal, cold, and interface plasma. For instance, the gas temperature of Ar gas at 760torr was about 4000-5000K.(3) Using these ultra-small plasma beam, we succeeded various micro-processing as follows : (A) melting of metal (Fe, Al, Cu). (B) oxidization. (C) deposition (C-system).Especially, due to the advance of matching performance, far from the plasma generating electric source, we could generate such small plasma and performe surface-treatment as mentioned above.