Application of microplasma to materials device process
微等离子体在材料器件工艺中的应用
基本信息
- 批准号:15075202
- 负责人:
- 金额:$ 53.38万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for Scientific Research on Priority Areas
- 财政年份:2003
- 资助国家:日本
- 起止时间:2003 至 2007
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
Based on the unique characteristics of microplasmas, such as an extraordinary locality and high density, development of various new application technologies are in progress. These include, e.g., novel materials processing, biomaterials treatment, chemical analysis, light sources of ultra-short wavelengths.In our group, in order to establish microplasma materials device processing, these studies have been performed as follows:(A) Development of high-rate materials device processing with using supercritical fluid (SCF) plasma: We developed supercritical fluid plasma devices and diagnosed the plasma properties. Applications of it to deposition of carbon and copper thin films were performed. These achievements make the non-equilibrium with high density and high-synthesis preparation of carbon nano-materials near the critical point.(B) Synthesis of novel materials by various microplasmas: We developed various types of microplasmas, such as atmospheric and in liquid plasma devices. Plasma diagnoses were performed to observe the super-non-equilibrium. Novel carbon-nano-materials were also found.(C) Fabrication of integrated plasma materials processing devices (plasma chip and plasma panel): We developed integrated plasma materials processing devices such as plasma chip and plasma panel, and diagnosed their plasma properties.
基于微等离子体独特的局域性和高密度等特点,各种新的应用技术正在不断发展。这些包括,例如,新材料加工,生物材料处理,化学分析,超短波光源。本课题组为建立微等离子体材料装置加工,开展了以下研究工作:(A)超临界流体等离子体高速材料装置加工的开发:研制了超临界流体等离子体装置,并对等离子体特性进行了诊断。并将其应用于碳和铜薄膜的沉积。这些成果使得高密度、高合成的非平衡碳纳米材料的制备接近临界点。(B)各种微等离子体合成新材料:我们开发了各种类型的微等离子体,如大气和液体等离子体装置。血浆诊断观察超非平衡状态。新的碳纳米材料也被发现。(三)等离子体材料集成加工器件(等离子体芯片、等离子体面板)研制:研制等离子体芯片、等离子体面板等等离子体材料集成加工器件,并对其等离子体性能进行诊断。
项目成果
期刊论文数量(196)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Spectroscopic diagnostics of microplasma processings in supercritical fluid
超临界流体中微等离子体处理的光谱诊断
- DOI:
- 发表时间:2006
- 期刊:
- 影响因子:0
- 作者:Y. Furutani;et. al.;N. Shirai;H. Akiyama;K. Ogata
- 通讯作者:K. Ogata
Gas-temperature-dependent characteristics of cryo dielectric barrier dischargde plasma undr atmospheric pressure
大气压下低温介质阻挡放电等离子体的气体温度相关特性
- DOI:
- 发表时间:2008
- 期刊:
- 影响因子:0
- 作者:Y. Noma;J. H. Choi;S. Stauss;T. Tomai;and K. Terashima
- 通讯作者:and K. Terashima
Development of wire spraying for direct micro-patterning via an atmospheric-pressure UHF inductively coupled microplasma jet
- DOI:10.1016/j.surfcoat.2005.01.113
- 发表时间:2006-04
- 期刊:
- 影响因子:5.4
- 作者:Y. Shimizu;T. Sasaki;A. C. Bose;K. Terashima;N. Koshizaki
- 通讯作者:Y. Shimizu;T. Sasaki;A. C. Bose;K. Terashima;N. Koshizaki
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TERASHIMA Kazuo其他文献
Low Temperature Plasma for Astrochemistry: Toward a Further Understanding with Continuous and Precise Temperature Control
天体化学中的低温等离子体:通过连续和精确的温度控制进一步了解
- DOI:
10.1585/pfr.15.1506041 - 发表时间:
2020 - 期刊:
- 影响因子:0.8
- 作者:
PHUA Yu Yu;SAKAKIBARA Noritaka;ITO Tsuyohito;TERASHIMA Kazuo - 通讯作者:
TERASHIMA Kazuo
TERASHIMA Kazuo的其他文献
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{{ truncateString('TERASHIMA Kazuo', 18)}}的其他基金
Creation of cryoplasma materials process science
创建冷等离子体材料工艺科学
- 批准号:
24246120 - 财政年份:2012
- 资助金额:
$ 53.38万 - 项目类别:
Grant-in-Aid for Scientific Research (A)
Development of novel materials surface modification/fabricationTechnology with a use of supercritical fluid ion beam
利用超临界流体离子束开发新型材料表面改性/制造技术
- 批准号:
24656436 - 财政年份:2012
- 资助金额:
$ 53.38万 - 项目类别:
Grant-in-Aid for Challenging Exploratory Research
Generation of ccryoplasma and its application to materials processing
冷原体的产生及其在材料加工中的应用
- 批准号:
21360356 - 财政年份:2009
- 资助金额:
$ 53.38万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Creation of solution plasma controlled in nano space and Its application to materials processing
纳米空间控制溶液等离子体的产生及其在材料加工中的应用
- 批准号:
19360326 - 财政年份:2007
- 资助金额:
$ 53.38万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Establishment of innovational materials surface treatment / modification technology with using supercritical cluster plasma fluid
利用超临界团簇等离子体流体建立创新材料表面处理/改性技术
- 批准号:
17360349 - 财政年份:2005
- 资助金额:
$ 53.38万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Establishment of novel materials surface treatment/modification technology with using supercritical fluid plasma beam
超临界流体等离子体束新型材料表面处理/改性技术的建立
- 批准号:
15360380 - 财政年份:2003
- 资助金额:
$ 53.38万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Integration of ultra-small plasma material processing device - fabrication of microscale plasma chip
超小型等离子体材料加工装置集成——微型等离子体芯片的制作
- 批准号:
12555185 - 财政年份:2000
- 资助金额:
$ 53.38万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Establishment of novel microscale surface treatment/processing technology with ultra-small plasma beam
新型超小等离子束微尺度表面处理/加工技术的建立
- 批准号:
12450288 - 财政年份:2000
- 资助金额:
$ 53.38万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Development of SPM operational in a plasma environmental and its application to the nano-scopic structural study of solid-plasma interface
等离子体环境下SPM的发展及其在固体-等离子体界面纳米结构研究中的应用
- 批准号:
10450231 - 财政年份:1998
- 资助金额:
$ 53.38万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
Development of STM operational in a plasma and its application to a control of plasma materials surface processing on an atomic scale
等离子体中运行的 STM 的开发及其在原子尺度上等离子体材料表面处理控制中的应用
- 批准号:
09555215 - 财政年份:1997
- 资助金额:
$ 53.38万 - 项目类别:
Grant-in-Aid for Scientific Research (B)
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