Development of novel materials surface modification/fabricationTechnology with a use of supercritical fluid ion beam
Development of novel materials surface modification/fabricationTechnology with a use of supercritical fluid ion beam
批准号:
24656436
负责人:
TERASHIMA Kazuo
金额:
$2.58万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Challenging Exploratory Research
财政年份:
2012
资助国家:
日本
项目状态:
已结题
起止时间:
2012 至 --
中文摘要
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英文摘要
In this study, fabrication of supercritical fluid ion (ion beam), spectroscopic diagnostics of supercritical fluid plasma as ion source, and its application to materials surface treatment/fabrication process were performed. Then, totally, the nature of high-performance process nature, such as its low-temperature process and environmental friendly process, were confirmed. As a result, the possibility of innovative high-performance materials surface treatment/fabrication process was demonstrated.
期刊论文(4)
专著(0)
科研奖励(0)
会议论文
まとめ:超臨界クラスター流体の材料科学 -プラズマプロセスのナノスケール揺らぎ-
摘要:超临界团簇流体的材料科学 - 等离子体过程中的纳米级波动 -
DOI:
--
发表时间:
期刊:
影响因子:
--
作者:
[M. Huda, J. Liu, Y. Yin, S. Hosaka, 寺嶋和夫, 上田 恭介, 寺嶋和夫]
通讯作者:
寺嶋和夫
ナノ界面プラズマの創成
纳米界面等离子体的创建
DOI:
--
发表时间:
2013
期刊:
影响因子:
--
作者:
[M. Huda, J. Liu, Y. Yin, S. Hosaka, 寺嶋和夫]
通讯作者:
寺嶋和夫
超臨界クラスター流体の材料科学-プラズマプロセスのナノスケール揺らぎ応用物理学会
超临界团簇流体材料科学 - 等离子体过程中的纳米级涨落 日本应用物理学会
DOI:
--
发表时间:
2013
期刊:
影响因子:
--
作者:
[Kentaro Jinno, Masako Ikeuchi, Yoshikazu Ohara, Kazushi Yamanaka, 寺嶋和夫]
通讯作者:
寺嶋和夫
Creation of cryoplasma materials process science
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批准号:24246120
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项目类别:Grant-in-Aid for Scientific Research (A)
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资助金额:$29.7万
-
财政年份:2012
-
负责人:TERASHIMA Kazuo
-
依托单位:
Generation of ccryoplasma and its application to materials processing
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批准号:21360356
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$11.56万
-
财政年份:2009
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负责人:TERASHIMA Kazuo
-
依托单位:
Creation of solution plasma controlled in nano space and Its application to materials processing
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批准号:19360326
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$13.06万
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财政年份:2007
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负责人:TERASHIMA Kazuo
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依托单位:
Establishment of innovational materials surface treatment / modification technology with using supercritical cluster plasma fluid
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批准号:17360349
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$9.79万
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财政年份:2005
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负责人:TERASHIMA Kazuo
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依托单位:
Establishment of novel materials surface treatment/modification technology with using supercritical fluid plasma beam
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批准号:15360380
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$9.86万
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财政年份:2003
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负责人:TERASHIMA Kazuo
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依托单位:
Application of microplasma to materials device process
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批准号:15075202
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项目类别:Grant-in-Aid for Scientific Research on Priority Areas
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资助金额:$53.38万
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财政年份:2003
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负责人:TERASHIMA Kazuo
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依托单位:
Integration of ultra-small plasma material processing device - fabrication of microscale plasma chip
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批准号:12555185
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$8.58万
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财政年份:2000
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负责人:TERASHIMA Kazuo
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依托单位:
Establishment of novel microscale surface treatment/processing technology with ultra-small plasma beam
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批准号:12450288
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$9.6万
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财政年份:2000
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负责人:TERASHIMA Kazuo
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依托单位:
Development of SPM operational in a plasma environmental and its application to the nano-scopic structural study of solid-plasma interface
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批准号:10450231
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$8.7万
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财政年份:1998
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负责人:TERASHIMA Kazuo
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依托单位:
Development of STM operational in a plasma and its application to a control of plasma materials surface processing on an atomic scale
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批准号:09555215
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$6.14万
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财政年份:1997
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负责人:TERASHIMA Kazuo
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依托单位:
Developmene of micro/nanoscale plasma generator and its application to materialn process
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批准号:07555513
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项目类别:Grant-in-Aid for Scientific Research (A)
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资助金额:$2.43万
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财政年份:1995
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负责人:TERASHIMA Kazuo
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依托单位:
Development of nano-scale processing with the tunneling electrons from a scanning tunneling microscope (STM) under atmospheric or reduced pressure
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批准号:03650539
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项目类别:Grant-in-Aid for General Scientific Research (C)
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资助金额:$1.41万
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财政年份:1991
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负责人:TERASHIMA Kazuo
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依托单位:
海外基金