Establishment of novel materials surface treatment/modification technology with using supercritical fluid plasma beam

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(1)Development of a Supercritical Fluid Dielectric Barrier Discharge Microplasma Processing DeviceWe have developed a supercritical fluid dielectric barrier discharge (DBD) microplasma processing device. Using this device, we applied optical emission spectroscopy (OES) to plasmas generated in high-pressure CO_2 environments up to supercritical condition. Two types of plasmas, namely, dielectric barrier discharge (DBD) and DC discharge were employed. Up to supercritical conditions, the spectra of C_2 molecule and atomic O were remarkable by optical emission spectroscopy of both types of discharge. Rotational temperature of C_2 was estimated as approximately 4000 K in DBD at 2.0 MPa.(2)Application of supercritical fluid plasmas to novel materials surface treatment & fabricationWe have applied two types of supercritical fluid plasmas, namely arc type & DBD type, to materials surface treatment and fabrication. Their dependences of process parameters, such as temperature, pressure, and frequency, on synthesized materials have been intensively investigated. Through these experiments, we have succeeded in carbon nanostructured materials, such as carbon nanotube and carbon nano-onion, synthesis and their thin films from scCO_2 as raw-materials at around 400K. In addition, metal film deposition has been also succeeded at around 400K.(3)Generation of Laser-induced supercritical fluid plasmaThe generation of laser-induced supercritical fluid plasma (for scCO_2 and scH_2O) has been successfully achieved. Moreover, SRS(Stimulated Raman Scattering) phenonema has been observed.