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PREPARATION OF DIAMOND-COATED MICRODRILL BY CHEMICAL VAPOR DEPOSITION

PREPARATION OF DIAMOND-COATED MICRODRILL BY CHEMICAL VAPOR DEPOSITION
化学气相沉积法制备金刚石涂层微钻
批准号：
09450288
负责人：
MOROOKA Shigeharu
金额：
$2.43万
依托单位：
KYUSHU UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1997
资助国家：
日本
项目状态：
已结题
起止时间：
1997 至 1998
来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09450288/
关键词：
diamond thin filmchemical vapor depositionhot-filamntdrill.boringmethaneultrasonic核発生ダイヤモンドマイクロドリルCVDマイクロ波プラズマ結晶析出コーティング

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中文摘要
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英文摘要
A diamond film was formed on a WC-Co microdrill with a three-dimensional complex shape by a hot-filament assisted chemical vapor deposition technique using methane and hydrogen. Prior to diamond deposition, the microdrill was dipped into nitric acid and then ultrasonically pretreated using nanoscale diamond particles suspended in water. These pretreatment were effective to improve the adhesion property of diamond film and to enhance the deposition density Diamond deposition was carried out through two steps : the first methane concentration was kept at ca. 6% in hydrogen and the second one was maintained at ca. 1% in hydrogen. The first step was important to form a continuous well-adhering diamond thin film. A diamond-coated microdrill was tested to bore holes through a machinable glass ceramics, and as a result, its boring performance was found to be about 7 times higher than that of uncoated one.
期刊论文(6)
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会议论文
S.Morooka: "Chemical Modification of Diamond Surfaces" Theories and Applications of Chemical Engineering. Vol.3 No.1. 1233-1236 (1997)
S.Morooka：“金刚石表面的化学改性”化学工程理论与应用。
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通讯作者：
齊藤 丈靖: "ダイヤモンド薄膜と半導体化技術の進展" ペテロテック. 20巻7号. 559-565 (1997)
Takeyasu Saito：“金刚石薄膜和半导体技术的进展”Peterotek，第 20 卷，第 7 期，559-565 (1997)。
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通讯作者：
H.Maeda, T.Saito, K.Kusakabe and S.Morooka: "Synthesis of Highly Oriented Diamond Film and Control of Its Surface Morphology" Hyomen-Gijutu. 48-1. 8-13 (1997)
H.Maeda、T.Saito、K.Kusakabe 和 S.Morooka：“高取向金刚石薄膜的合成及其表面形态的控制”Hyomen-Gijutu。
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T.Saito: "Improvement of Diamond Nuclei Orientation by Double-Step Bias Treatment in Microwave Plasma-Assisted Chemical Vapor Deposition Using C_2H_4 and CH_4 as Carbon Source" Diamond and Related Materials. Vol.6. 668-672 (1997)
T.Saito：“使用 C_2H_4 和 CH_4 作为碳源，通过微波等离子体辅助化学气相沉积中的双步偏压处理来改善金刚石核取向”金刚石和相关材料。
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共 6 条
    Development of gravity-impervious, transportable chemical processes and creation of specialized reaction systems
    • 批准号：
      17360378
    • 项目类别：
      Grant-in-Aid for Scientific Research (B)
    • 资助金额：
      $8.38万
    • 财政年份：
      2005
    • 负责人：
      MOROOKA Shigeharu
    • 依托单位：
      FUKUOKA UNIVERSITY
    Formation and Transportation of Disperesed Phases in Microchannels and Development of Microseparators for Heterogeneous Systems.
    • 批准号：
      15360415
    • 项目类别：
      Grant-in-Aid for Scientific Research (B)
    • 资助金额：
      $6.85万
    • 财政年份：
      2003
    • 负责人：
      MOROOKA Shigeharu
    • 依托单位：
      Fukuoka University
    Development of Microreactions for Applications to Thermochemical Reactors and Miniaturized Fuel Cells
    Surface Modification of Diamond by Organic Reactions for Preparation of Advanced Functional Devise
    • 批准号：
      11450293
    • 项目类别：
      Grant-in-Aid for Scientific Research (B).
    • 资助金额：
      $8.9万
    • 财政年份：
      1999
    • 负责人：
      MOROOKA Shigeharu
    • 依托单位：
      KYUSHU UNIVERSITY
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