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Development and Application of Growth Methods of Functional Thin Films.

功能薄膜生长方法的开发与应用。

基本信息

批准号：
63302021
负责人：
YASUDA Yukio
金额：
$ 7.23万
依托单位：
Nagoya University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Co-operative Research (A)
财政年份：
1988
资助国家：
日本
起止时间：
1988 至 1989
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-63302021/
关键词：
Functional Thin Film Thin Film Growth Method

项目摘要

The purpose of this study is to research new functional thin films and to develop thin film growth methods through a technological and interdisciplinary interchange among the researchers which investigate functional materials and thin film growth methods. In this period of study, various functional thin films and growth methods have been developed in each research field attracted attention now. It can be said that our original purpose has been achieved by the study in closer cooperation with researchers in other fields. A part of concrete results is as follows: (1) Gas source molecular beam epitaxy has been drastically extended in this period, and formation of very thin films of high quality and precise control of film growth has been made possible. (2) By using excited processes, new functional thin films such as diamond and composite films of metal-organic material and thin films which cannot be formed by a conventional method have been formed. In addition, the low temperature growth of high-T_c superconducting thin films has been also successful. (3) The growth control technology at atomic layer level has lead to development of solid state physics at interfaces and surfaces. (4) The study including a possibility as functional thin films, such as an application of diamond films to semiconductors and physical properties of composite films of metal-organic material and insulator semiconductor, has been developed.We have been able to grasp the relation between thin film growth methods and functional materials in the form of a matrix. This fact leads to the effective application of growth methods and makes clear the field remaining as an unknown domain of science. Therefore, we can expect the development of material and growth methods in this domain, because the unknown domain is considered to have a potential possibility.

本研究的目的是通过研究功能材料和薄膜生长方法的研究人员之间的技术和跨学科交流，研究新的功能薄膜和开发薄膜生长方法。在这段时间里，各种功能薄膜和生长方法在每个研究领域都得到了开发和应用，引起了人们的关注。可以说，我们的初衷是通过与其他领域的研究人员更紧密地合作来实现的。部分具体结果如下：(1)气源分子束外延技术在这一时期得到了极大的发展，使高质量薄膜的形成和薄膜生长的精确控制成为可能。(2)利用激发过程，形成了新的功能薄膜，如金刚石薄膜、金属-有机材料复合膜以及传统方法无法形成的薄膜。此外，高温超导薄膜的低温生长也取得了成功。(3)原子层水平的生长控制技术促进了界面和表面固体物理的发展。(4)开展了金刚石薄膜在半导体中的应用以及金属有机材料和绝缘半导体复合薄膜的物理性质等作为功能薄膜的可能性的研究，掌握了薄膜生长方法与以基质形式存在的功能材料之间的关系。这一事实导致了生长方法的有效应用，并表明该领域仍然是一个未知的科学领域。因此，我们可以期待材料和生长方法在这一领域的发展，因为未知领域被认为具有潜在的可能性。