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High-power electrostatic levitation linear motor for ultra-clean and vacuum environment

适用于超净真空环境的大功率静电悬浮直线电机

基本信息

批准号：
12355011
负责人：
HIGUCHI Toshiro
金额：
$ 27.49万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2002
项目状态：
已结题

项目摘要

In this research, we have developed high-power electrostatic linear levitation motor for vacuum condition. Since electrostatic motor does not emit magnetic field it is suitable for EB applications, such as electron microscope and EB lithography system, which are some of the most important applications using vacuum condition.In the first step of the research, we have developed electrostatic linear motor stage specialized for vacuum use, with which characteristics of non-levitation electrostatic motor in vacuum condition was investigated. The developed stage generates almost the same thrust force in vacuum as in the normal condition. We have developed new electrostatic linear encoder which is embedded into the electrostatic motor. Using the developed linear encoder, we perform positioning control in vacuum condition.Next, we have studied electrostatic levitation motor, in which high-power electrostatic motor technology and electrostatic levitation technology are combined. We proposed several principles for levitation motor and revealed their characteristics theoretically. To verify the proposed principles, we have developed two-DOF prototype, which has one degree of freedom for thrust direction and one for levitating direction. The developed prototype demonstrated levitated driving motion in vacuum condition. The slider was levitated under the stator with a gap of 200μm and moved with a speed of 20mm/s in the thrust direction. Also, we performed positioning control with keeping levitated state. These results verify the proposed principles of electrostatic levitation motor.

在本研究中，我们研制了适用于真空环境的大功率静电直线悬浮电机。由于静电电机不会产生磁场，因此适合于电子束应用，如电子显微镜和电子束光刻系统，这是真空条件下的一些最重要的应用。发展级在真空中产生的推力与正常情况下几乎相同。我们开发了一种新型的静电直线编码器，并将其嵌入到静电电机中。利用研制的直线编码器，在真空条件下进行定位控制。其次，研究了将大功率静电电机技术与静电悬浮技术相结合的静电悬浮电机。提出了悬浮电机的几种工作原理，并从理论上揭示了它们的特点。为了验证所提出的原理，我们研制了一个推力方向和悬浮方向各有一个自由度的两自由度样机。所开发的样机演示了真空条件下的悬浮驱动运动。滑块悬浮在定子下方，间隙为200μm，沿推力方向以20 mm/S的速度移动。并在保持悬浮状态的情况下进行了定位控制。这些结果验证了提出的静电悬浮电机的工作原理。