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Preparation of Amorphous Thin Films with High Elasticity

高弹性非晶薄膜的制备

基本信息

批准号：
03650623
负责人：
HANADA Teiichi
金额：
$ 1.22万
依托单位：
KYOTO UNIVERSITY
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (C)
财政年份：
1991
资助国家：
日本
起止时间：
1991 至 1992
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03650623/
关键词：
Amorphous Thin Film Rf-Sputtering Young's Modulus Amorphous Alumina-Titania Film High Elasticity Amorphous AlN Film 非晶質AlN膜 Al_2O_3ーTiO_2系膜

项目摘要

Among various properties of solid materials, elastic properties such as Young's modulus, bulk modulus, shear modulus and Poisson's ratio are of considerable interest from both scientific and technical aspects. It is known that the glasses containing the constituents with high bond strength and/or having high coordinated state of network forming cations could achieve high elastic moduli. However, since it is not easy to make the glasses with high coordinated state of cations by ordinary melting-quenching procedure, other glass making processes such as sputtering, CVD and sol-gel methods have to be explored. In this project, radio-frequency sputtering method was applied to make amorphous thin films in the systems Al_203-AlN and Al_2O_3-TiO_2. The elastic moduli commonly increase as nitrogen is introduced into a glass. However, in the Al_2O_3-AlN system, the elastic moduli decreased as AlN was added to amorphous Al_2O_3. This result can be successful to be explained by decrease of the higher coordinated aluminum ions. On the other hand, the high coordinated state of cations could be achieved in rf-sputtered amorphous films in the system Al_2O_3-TiO_2, and their elastic moduli were measured. The amorphous film of 16Al_2O_3.84TiO_2 showed the maximum value of Young's modulus, 175GPa, in this system, which is higher than any other glass ever known.

在固体材料的各种性质中，弹性性质如杨氏模量、体积模量、剪切模量和泊松比从科学和技术方面都是相当感兴趣的。已知包含具有高结合强度和/或具有高配位态的网络形成阳离子的组分的玻璃可以实现高弹性模量。然而，由于采用普通的熔融-淬冷法制备阳离子高度配位的玻璃并不容易，因此必须探索其他玻璃制备方法，如溅射法、化学气相沉积法和溶胶-凝胶法。本课题采用射频溅射法制备了Al_2O_3-AlN和Al_2O_3-TiO_2系统的非晶薄膜。当氮被引入到玻璃中时，弹性模量通常增加。而在Al_2O_3-AlN体系中，随着AlN的加入，非晶态Al_2O_3的弹性模量降低。这一结果可以用高配位铝离子的减少来解释。在Al_2O_3-TiO_2系统中，溅射非晶薄膜中的阳离子可以达到高配位状态，并测量了它们的弹性模量。非晶薄膜16Al_2O_3.84TiO_2在该系统中显示出最大值175 GPa，这是迄今为止已知玻璃中最高的。