Microsystems Using Intelligent Materials

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The purpose of this research projects is to investigate the basic structures and performances of microsystems, such as microactuators, microsensors, etc. The research activity in this project focused on microfluidic actuators and microsystems using electromagnetically functional materials.For the purpose of an application of laminar proportional fluidic amplifier to micro-fluidics, a device controlling the low pressure is proposed and the static characteristics have been investigated.Application of micro-fluidcs to flow control problems has been investigated. Numerical analysis has been performed on the microcirculation of the human body as a fundamental consideration of bio-fluid control with micro-fluidics. Optimum condition of turbulent flow control with micro-valves has also been investigated via numerical analysis.Optical alignment technique using shape memory alloy (SMA) actuator was studied. It is shown that the SMA actuator is useful for precise optical alignment and for miniatureize the optical system.