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Non-planar lithography using holographic projection

使用全息投影的非平面光刻

基本信息

批准号：
07455059
负责人：
HANE Kazuhiro
金额：
$ 3.71万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1997
项目状态：
已结题

项目摘要

In this project, holographic 3D projection lithography is proposed, The computer generated Fresnel hologram was fabricated by the pattern generator. The data necessary for the pattern generator was obtained auto matically after calculating the hologram. The hologram generated a 3D image, by which the resist film was exposed. The characteristics of the projection lithography using the computer generated hologram were investigated.We proposed the holographic projection for the fabrication of scale grating of encoder. With a intense thermal vibration, optical encoder yields measuring error because of the generation of nonlinear strain due to the difference of the thermal expansion coefficient between a glass scale and a matallic part of machines. In this study, we propose a method of using a grating which is directly manufactured on a rough metallic surface of parts of machines. Using this method, the thermal strain is made linear and the error becomes simplified to calibrate. Furthermore, it realizes a miniaturization of the system and improves its vibration-resistance. This study shows the process of making a grating on a rough metallic surface by photolithography using several method and ascertains the sufficient performance of this scale in an optical encoder.In addition, we investigate the incoherent projection of grating pattern using the grating imaging technique. The characteristics of the imaging were investigated based on the optical transfer function.

在该项目中，提出了全息3D投影光刻，由图案生成器制造计算机生成的菲涅耳全息图。计算全息图后自动获得图案生成器所需的数据。全息图生成 3D 图像，通过该图像曝光抗蚀剂膜。研究了计算机全息投影光刻的特点。提出了用全息投影制作编码器光栅的方法。在强烈的热振动下，光学编码器由于玻璃尺和机器金属部件之间的热膨胀系数差异而产生非线性应变，从而产生测量误差。在这项研究中，我们提出了一种使用直接在机器零件的粗糙金属表面上制造光栅的方法。使用这种方法，热应变呈线性，并且误差变得简化以进行校准。此外，实现了系统的小型化并提高了其抗振性。本研究展示了使用多种方法通过光刻在粗糙金属表面上制作光栅的过程，并确定了该光栅在光学编码器中的足够性能。此外，我们使用光栅成像技术研究了光栅图案的非相干投影。基于光学传递函数研究了成像特性。