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Fabrication of micro rotary encoder for robot finger and precision machines

用于机器人手指和精密机器的微型旋转编码器的制造

基本信息

批准号：
11355018
负责人：
HANE Kazuhiro
金额：
$ 18.67万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1999
资助国家：
日本
起止时间：
1999 至 2001
项目状态：
已结题

项目摘要

In this project, in order to fabricate the grating patterns of encoder on metal rod surface by lithography, a resist spray method and a pattern transfer technique were proposed. Uniform resist film was coated even on a rough surface. The pattern on the conventional planer mask was transferred to the cylindrical surface by the newly proposed technique, in which mask translation and rod rotation were precisely controlled. Therefore, the pattern ends were connected precisely. The 40 μm pitch grating pattern was transferred on the stainless rod of 3 mm in diameter. Etching the metal surface, the grating pattern was formed on the metal rod.As to the sensor part of the encoder, index grating, photo-detector, light source were integrated by silicon micromachining. The index grating was consisted of Si grids. The photodiodes were installed on the Si grids of the index grating. The light source suited for the encoder was spatially fabricated of GaAs substrate. By stacking those components, a micro optical encoder was integrated.In the application to the robot finger, an experimental setup for the finger was fabricated, in which the proposed encoder was installed. Although the encoders installed in the setup were small, the encoder signal was precise enough for the purpose. From those experimental results, most of the purpose of the project was accomplished.

在本项目中，为了利用光刻技术在金属棒表面制作编码器的光栅图形，提出了一种抗蚀剂喷涂法和图形转移技术。即使在粗糙的表面上也能涂上均匀的抗蚀剂薄膜。该技术将传统平面掩模上的图形转移到圆柱面上，精确控制掩模的平移和杆的旋转。因此，图案末端是精确连接的。将40μm间距的光栅图转移到直径为3 mm的不锈钢棒上。通过对金属表面的刻蚀，在金属棒上形成光栅图形，在编码器的传感部分，采用硅微机械加工将索引光栅、光电探测器、光源等集成在一起。折射率光栅由硅栅组成。光电二极管安装在索引光栅的硅栅上。适用于编码器的光源是用砷化镓衬底在空间上制作的。通过堆叠这些元件，集成了一个微型光学编码器。在应用于机器人手指的应用中，制作了一个手指实验装置，其中安装了所提出的编码器。虽然安装在装置中的编码器很小，但编码器信号的精度足以满足要求。从这些实验结果来看，项目的大部分目的都达到了。