权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Tunable photonic devices fabricated by micro-nano machining for optical communication

用于光通信的微纳加工制造的可调谐光子器件

基本信息

批准号：
14102022
负责人：
HANE Kazuhiro
金额：
$ 68.64万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (S)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2006
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14102022/
关键词：
Micromachining Photonic crystal Micro-actuator Filter Optical switch シリコン光通信

项目摘要

Introducing MEMS into photonic crystal structure, the light wave was controlled. Photonic crystal waveguide switch was fabricated, and the characteristics were measured. In the proposed structure, the photonic crystal slabs were divided into three parts. The waveguides were connected to a micro electrostatic actuator. The proposed structures were investigated theoretically using FDTD method. The optimum conditions of the gap between the fixed and movable waveguides were obtained. Using SOI wafer, two-dimensional photonic crystal waveguides were fabricated. Using electron beam drawing machine, the hole patterns having 400nm period and 300nm diameter were transferred to the top silicon layer of the SOI wafer. Using the fast atom beam and deep reactive ion etching machines, the crystal holes were etched with a high aspect ratio. In order to remove the sacrificial silicon dioxide layer underneath the silicon layer, the hydrogen fluoride vapor etching machine was improved. Parallel plate and comb electrostatic micro-actuators were fabricated. By improving the designs and the micromachining techniques, the photonic crystal structure with MEMS were successfully fabricated. In the case of the switch with the parallel plate actuator. observing the device with an infrared camera, it was confirmed that the fabricated devices operated well. With the application of a voltage, the light scattering from gap of the photonic crystal waveguides was modulated. The light transmitted through the photonic crystal switch was measured as a function of the voltage applied to the micro-actuator. At the voltage of 180V, minimum transmission was obtained, which corresponded to the 'switch-off" condition. Further increasing the voltage, the light leaked directly through the gap between the input and output waveguides. The photonic crystal waevguide switches with the lateral comb actuator were also fabricated, and the optical properties were evaluated.

在光子晶体结构中引入MEMS技术，实现了对光波的控制。制作了光子晶体波导开关，并对其特性进行了测试。在所提出的结构中，光子晶体板被分为三个部分。将波导连接到微型静电致动器。利用FDTD方法对所提出的结构进行了理论研究。得到了固定波导与可动波导之间的差距的最佳条件。利用SOI材料制作了二维光子晶体波导。利用电子束绘图机将周期为400 nm、直径为300 nm的孔图案转移到SOI晶片的顶部硅层上。利用快原子束和深反应离子刻蚀机，刻蚀出了高深宽比的晶体孔。为了去除硅层下面的二氧化硅牺牲层，对氟化氢气相刻蚀机进行了改进。制作了平行板和梳状静电微驱动器。通过改进设计和微机械加工工艺，成功制备了具有MEMS结构的光子晶体结构。在具有平行板致动器的开关的情况下。用红外照相机观察该器件，证实所制造的器件工作良好。通过施加电压，对光子晶体波导缝隙的光散射进行调制。通过光子晶体开关传输的光被测量为施加到微致动器的电压的函数。在180V的电压下，获得最小透射率，其对应于“关断”条件。进一步增加电压，光直接通过输入和输出波导之间的差距泄漏。制作了具有横向梳状驱动器的光子晶体波导开关，并对其光学特性进行了测试。