Studies on the evaluation techniques for micro-mechanical structures by using scanning probe microscopy

扫描探针显微镜微机械结构评价技术研究

• 批准号: 03650083
• 负责人: HANE Kazuhiro
• 金额: $ 1.28万
• 依托单位: NAGOYA UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for General Scientific Research (C)
• 财政年份: 1991
• 资助国家: 日本
• 起止时间: 1991 至 1992
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-03650083/
• 关键词: Micro-machine; Atomic force Microscope; Micro-machining; Young's Modulus; Adhesive Force; アトミックフォ-ス顕微鏡; トンネル顕微鏡; 非破壊検査; ナノメ-トル加工

We developed a new method for measuring the mechanical properties of micromechanical structures by using a force microscope. A high resolution scanning force microscope system using a laser hetrodyne interferometry was constructed. Some kinds of microcantilever arrays were fabricated by the lithographic processed and the spring constants were determined to obtain the Young's modulus of the thin film materials. Moreover, adhesive force was investigated by using the Si3N4 probe with a sharp tip and some kinds of substrates used for micromachining processes. The adhesive forces measured for the five kinds of solutions were in the range from 10 to 100nN. The effects of the surface roughness and contact area on the adhesive force were also examined. The results were discussed from the point of view of the macroscopic adhesive theory. Those techniques are simple and applicable to the evaluation of elasticity and adhesion of the micro-mechanical structures.

提出了一种利用力显微镜测量微机械结构力学性能的新方法。建立了一套基于激光外差干涉的高分辨率扫描力显微镜系统。采用光刻工艺制作了几种微悬臂梁阵列，并通过测量其弹性常数，得到了薄膜材料的杨氏模量。此外，使用Si 3 N4探针与用于微加工工艺的几种基板的粘附力进行了研究。测得五种溶液的粘附力在10 ~ 100 nN之间。研究了表面粗糙度和接触面积对粘附力的影响。从宏观粘接理论的角度对结果进行了讨论。这些技术简单，适用于评价的弹性和粘附的微机械结构。

项目成果

鳥井 昭宏,佐々木 実,羽根 一博,大熊 繁: "フォース顕微鏡の荷重-たわみ曲線を用いたマイクロメカニカル構造の弾性評価法" 電気学会論文誌A. 112-A. 979-986 (1992)

Akihiro Torii、Minoru Sasaki、Kazuhiro Hane、Shigeru Okuma：“使用力显微镜载荷-挠度曲线的微机械结构弹性评估方法”IEEJ Transactions A. 979-986 (1992)

鳥井 昭宏,佐々木 実,羽根 一博,大熊 繁: "フォース顕微鏡の荷重ーたわみ曲線を用いたマイクロメカニカル構造の弾性評価法" 電気学会論文誌A. 112-A. 979-986 (1992)

Akihiro Torii、Minoru Sasaki、Kazuhiro Hane、Shigeru Okuma：“使用力显微镜载荷-挠度曲线的微机械结构弹性评估方法”IEEJ Transactions A. 979-986 (1992)

A.Torii,M.Sasaki K.Hane,S.Okuma: "Application of Scanning Force Microscopy to the Evaluation of Micro Mechanical Structure" Proc.Int.Sym.on Theory of Machines and Mechanisms. 298-303 (1992)

A.Torii、M.Sasaki K.Hane、S.Okuma：“扫描力显微镜在微机械结构评估中的应用”Proc.Int.Sym.on 机器与机构理论。

M.Sasaki,M.Hino,K.Fujita,Y.Bessho,K.Hane,S.Okuma: "Development of Atomic Force Microscope Using Heterodyne Interferometry" New Studies in Applied Electromagnetics in Materials. 2. (1992)

M.Sasaki、M.Hino、K.Fujita、Y.Bessho、K.Hane、S.Okuma：“利用外差干涉法开发原子力显微镜”材料应用电磁学的新研究。

鳥井 昭宏,佐々木 実,羽根 一博,大熊 繁: "フォ-ス顕微法を用いたマイクロメカニカル構造の評価法" 電気学会論文誌. (1992)

Akihiro Torii、Minoru Sasaki、Kazuhiro Hane、Shigeru Okuma：“使用力显微镜评估微机械结构的方法”日本电气工程师学会期刊（1992 年）