Studies on the evaluation techniques for micro-mechanical structures by using scanning probe microscopy

点击翻译按钮获取中文摘要

We developed a new method for measuring the mechanical properties of micromechanical structures by using a force microscope. A high resolution scanning force microscope system using a laser hetrodyne interferometry was constructed. Some kinds of microcantilever arrays were fabricated by the lithographic processed and the spring constants were determined to obtain the Young's modulus of the thin film materials. Moreover, adhesive force was investigated by using the Si3N4 probe with a sharp tip and some kinds of substrates used for micromachining processes. The adhesive forces measured for the five kinds of solutions were in the range from 10 to 100nN. The effects of the surface roughness and contact area on the adhesive force were also examined. The results were discussed from the point of view of the macroscopic adhesive theory. Those techniques are simple and applicable to the evaluation of elasticity and adhesion of the micro-mechanical structures.