Measurment and estimation of residual stress distribution in thim films and coatings

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1. X-ray penetration depthThe stress gradient should be analyzed by the weighted average stress on the basis of the intensity of the diffracted X-rays from the entire thin film, when the thickness is six times larger than the effective X-ray penetration depth2. Analysis on residual stress distribution ground ceramiceA new method of X-ray stress measurement was proposed to determine the distridution of residual stress beneath the ground surface of ceramics from the non-linear relation between the diffraction angle and the sin^2psi (psi=the X-ray inclination angle). By taking account of the effect of the surface roughness on the measureed stress value, the Bezier curve was applied to fid the residual stress distribution. The residual stress distribution determined by the new method agreed with the residual stress distribution measured by the surface-removal method.Thermal barrier coating film (TBC-film)TBC film show slipping and nonlinear behavior in addition to elastic behavior due to pores and cracks of TBC films. To measure residual stresses of TBC films, the testing method for TBC film is needed.