Super Clean Non-Contact Conveying System Utilizing Electrostatic Force

在液晶显示器（LCD）或半导体制造过程中，为了减少二次粒子对产品表面的污染，需要开发玻璃板或硅片的非接触式输送系统。此外，与液晶显示器的大型化趋势成比例，传统的输送系统利用固定在机器人手臂末端执行器上的真空吸盘，在玻璃基板上产生了相当大的挠度。基于上述两个原因，需要开发一种新的薄玻璃板输送系统，本研究成功地研制了一种用于薄玻璃板的静电悬浮吸盘。为了使作为柔性物体的薄板悬浮，必须控制悬浮过程中薄板各小区域上的操作力。用于产生静电悬浮力的电极被分割成多个部分，并且施加到每个电极单元的电压被设定为恒定。 ...更多信息 这是基于相应间隙传感器的输出来控制的。一个原型机构被确认为悬浮一个278 mm x 78 mm x 0.05 mm的薄铝板，在电极板下方有一个大约0.5 mm的间隙。垂直振动幅值约为±5μm，这是差距传感器的分辨率。另一个原型机构wag也建造悬浮的钠钙玻璃板的385 hm × 130 mm × 0.7mm的大小。尽管玻璃的表面电阻率很高，这将降低悬浮的稳定性，但我们成功地悬浮了上述玻璃板。在本研究中，我们还成功地开发了一种新的非接触输送系统，利用空气轴承和静电推进相结合的薄玻璃板。提出了一种合适的电极结构，并通过测力和输送实验验证了其有效性。在差距为130μm时，以150 mm/s的速度输送52 mm × 52 mm × 0.7 mm的钠钙玻璃板，横向振动小于± 0.5 mm。少

To reduce the contamination of product surfaces by duet particle in manufacturing process of Liquid Crystal Display (LCD) or semiconductors, the development of non-contact conveying system for glass plate or silicon wafer is essentia1. Furthermore, in proportion to the large-sizing tendency of LCD, the conventional transportation system utilizing vacuum chuck fixing on the end-effecter of robot arm gives a pretty deflection on the glass base-plate. Because of the two reasons mentioned above, the development of a new conveying system for thin glass plate is required.In this research, an electrostatic suspension chuck for thin plate has been successfully developed. For the purpose to levitate a thin plate, which should be considered as a flexible object, the operating force on each small area of the thin plate during levitation has to be controlled. The electrode employed for generating electrostatic levitation force was divided to pieces, and the applied voltage to each electrode unit w … More as controlled based on the output of the corresponding gap sensor. A prototype mechanism was confirmed to levitate a thin aluminum plate of 278mm x 78mm x 0.05mm in size, with a gap of around 0.5mm steadily beneath the electrode plate. The vertical vibration amplitude was about ±5μm, which was the resolution of the gap sensor. Another prototype mechanism wag also constructed to levitate a soda-lime glass plate of 385hm x 130mm x 0.7mm in size. Despite of the glass's high surface resistivity, which would deteriorate the stability of levitation, we succeeded in the levitation of the mentioned glass plate.In this research, we also successfully developed a new non-contact conveying system for thin glass plate, utilizing combination of air bearing and electrostatic propelling. An appropriate structure for electrode was proposed, and its effectiveness was confirmed through the force measuring and conveying experiment. A soda-lime glass plate of 52mm x 52mm x 0.7mm in size wag conveyed at a speed of 150mm/s with a lateral vibration less than ±0.5mm, when the gap width was 130μm. Less