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Surface acoustic wave gyroscope

声表面波陀螺仪

基本信息

批准号：
07555424
负责人：
HIGUCHI Toshiro
金额：
$ 2.75万
依托单位：
UNIVERSITY OF TOKYO
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
1995
资助国家：
日本
起止时间：
1995 至 1997
项目状态：
已结题

项目摘要

A surface acoustic wave gyroscope using an operation frequency of 15 MHz, a wave mode of Rayleigh wave and a piezoelectric substrate of LiNbO3 128ﾟ Y-cut was designed. Electrodes of an interdigital transducer (IDT : called "generator IDT") and two reflectors are aligned for generating a standing wave on the surface. Two IDTs (called "sensor IDTs") and two reflectors for receiving a secondary wave are aligned perpendicularly into the electrodes which generate the primary standing wave. Perturbation electrodes are arranged between the IDTs. A principle of this gyroscope is receiving the secondary wave excited by the perturbation electrodes with rotation of the substrate. An output voltage of few tens of mV with rotation rate 2pi rad/s was estimated by using equivalent circuit models. This sensor with electrodes of aluminum and chromium and the size of 25mm x 45mm was fabricated by using photo-process.On sensor IDT,a different anti-resonance frequency from a resonance frequency of generator IDT and low Q factor was found from measuring admittance characteristic versus frequency. Therefor, output voltage will be decreased to less than one hundred muV.And waves scattered by the perturbation electrodes were observed. These scattered waves were detected by the sensor IDTs. Some perturbation electrode with different vibration condition from our design were found by vibration measuring. Further, the primary standing wave was not formed clearly. Thus, a vibrating table was used to detect the output of the gyroscope, for the output voltage was too low. The output of sensor IDT was amplified with locking in the frequency of table vibration. But, unfortunately, the output voltage could not detected yet.

设计了一种工作频率为15 MHz、瑞利波模式、LiNbO3128ﾟY型切割压电基板的声表面波陀螺仪。叉指换能器(IDT：称为“发生器IDT”)的电极和两个反射器对齐，以便在表面上产生驻波。两个IDT(称为“传感器IDT”)和两个用于接收二次波的反射器垂直对准产生初级驻波的电极。微扰电极设置在IDT之间。该陀螺仪的工作原理是通过旋转衬底来接收微扰电极激发的二次波。用等效电路模型估算了旋转速度为2pirad/S的几十mV的输出电压。该传感器以铝和铬为电极，采用光刻工艺制作，尺寸为25 mm×45 mm，在传感器IDT上，通过测量导纳特性随频率的变化，发现了与发电机IDT的谐振频率不同的反谐振频率和较低的Q因数。因此，输出电压将降低到100微伏以下，并观察到微扰电极的散射波。这些散射波是由传感器IDT探测到的。通过振动测量发现了一些与我们设计的振动条件不同的摄动电极。此外，初级驻波也没有清晰地形成。因此，由于输出电压太低，使用振动台来检测陀螺仪的输出。通过锁定工作台振动频率，放大传感器IDT的输出。但不幸的是，目前还无法检测到输出电压。