Development of a Multi-Layered Electrostatic Film Actuator for an Artificial Muscle
用于人造肌肉的多层静电薄膜致动器的开发
基本信息
- 批准号:02452129
- 负责人:
- 金额:$ 2.88万
- 依托单位:
- 依托单位国家:日本
- 项目类别:Grant-in-Aid for General Scientific Research (B)
- 财政年份:1990
- 资助国家:日本
- 起止时间:1990 至 1991
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
The goal of the research is to develop an electrostatic artificial muscle, a muscle-like flexible actuator with large force density, by stacking thin, film-shaped electrostatic actuators. The electrostatic artificial muscle is constructed from induction charge film actuators newly developed by the investigators specifically for the artificial muscle. The induction charge film actuator consists of a stator film having a large number of striped electrodes and a slider film coated with a high-resistor layer. In this research project, key technologies for the film actuator such as material, design, fabrication, and control techniques are investigated and prototypes of artificial muscle are developed. The following results are obtained in the project.1. Two prototypes of the induction charge film actuator are fabricated. One has 420mum-pitched electrodes and the other has 120mum-pitched electrodes. Both actuators are successfully operated.2. Characteristic of the induction charge actuator is investigated by means of numerical electric field analysis. As a result, the optimum value for the distance between electrodes on the stator and the resistor layer on the slider is found to be 1/5 of the electrode pitch.3. Two prototypes of the electrostatic artificial muscle are constructed using the film actuators with 420mum-pitched and 100mum-pitched electrodes. Better performance is attained by the artificial muscle with electrodes of the smaller pitch. Its force density and power density are 35N/kg and 1W/kg respectively. This force density is comparable to conventional electromagnetic actuators.4. Micro step driving methods are developed. In the induction charge actuator driven by the normal method, the displacement of the slider in one sequence of drive equals to the electrode pitch. The micro step drive reduces the resolution to be less than 1/40 of the electrode pitch.
这项研究的目标是开发一种静电人工肌肉,一种具有大力密度的肌肉状柔性驱动器,通过堆叠薄的薄膜形状的静电驱动器来实现。静电人工肌肉是由研究人员专门为人工肌肉开发的感应电荷膜致动器构建的。感应电荷膜致动器由具有大量条状电极的定子膜和涂有高阻层的滑动膜组成。本课题对薄膜驱动器的材料、设计、制造、控制等关键技术进行了研究,并研制出了人工肌肉样机。本项目取得了以下成果:1.制作了两种感应式电荷膜驱动器的样机。一个有420微米间距的电极,另一个有120微米间距的电极。两个执行器都运行成功。用数值电场分析的方法研究了感应电荷致动器的特性。结果发现,定子上的电极与滑块上的电阻层之间的距离的最佳值为电极间距的1/5。利用电极间距为420微米和100微米的薄膜驱动器构建了两种静电人工肌肉样机。电极间距较小的人工肌肉具有更好的性能。其力密度和功率密度分别为35N/kg和1W/kg。这种力密度可以与传统的电磁驱动器相媲美。开发了微步进驱动方法。在用常规方法驱动的感应电荷执行器中,滑块在一个驱动序列中的位移等于电极间距。微步进驱动将分辨率降低到电极间距的1/40以下。
项目成果
期刊论文数量(8)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
Saku Egawa,Toshiki Niino,Toshiro Higuchi: "Film Actuators:Planar,Electrostatic SurfaceーDrive Actuators" Proceedings for the fourth IEEE Micro Electro Mechanical Systems Workshop. 9-14 (1991)
Saku Ekawa、Toshiki Niino、Toshiro Higuchi:“薄膜致动器:平面、静电表面驱动致动器”第四届 IEEE 微机电系统研讨会论文集 (1991)。
- DOI:
- 发表时间:
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- 影响因子:0
- 作者:
- 通讯作者:
柄川 索,樋口 俊郎: "誘導電荷形静電フィルムアクチュエ-タの開発" 電気学会論文誌.
Saku Karakawa、Toshiro Higuchi:“感应电荷型静电薄膜致动器的开发”日本电气工程师学会会刊。
- DOI:
- 发表时间:
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- 影响因子:0
- 作者:
- 通讯作者:
Saku Egawa and Toshiro Higuchi: "Development of Induction Charge Electrostatic Film Actuator" Tran. IEE Japan.
江川佐久和樋口俊郎:“感应电荷静电薄膜致动器的开发”Tran。
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HIGUCHI Toshiro其他文献
HIGUCHI Toshiro的其他文献
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High-power electrostatic levitation linear motor for ultra-clean and vacuum environment
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12355011 - 财政年份:2000
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