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Development of a Multi-Layered Electrostatic Film Actuator for an Artificial Muscle

用于人造肌肉的多层静电薄膜致动器的开发

基本信息

批准号：
02452129
负责人：
HIGUCHI Toshiro
金额：
$ 2.88万
依托单位：
University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (B)
财政年份：
1990
资助国家：
日本
起止时间：
1990 至 1991
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-02452129/
关键词：
Electrostatic Actuator Artificial Muscle Micro-motor

项目摘要

The goal of the research is to develop an electrostatic artificial muscle, a muscle-like flexible actuator with large force density, by stacking thin, film-shaped electrostatic actuators. The electrostatic artificial muscle is constructed from induction charge film actuators newly developed by the investigators specifically for the artificial muscle. The induction charge film actuator consists of a stator film having a large number of striped electrodes and a slider film coated with a high-resistor layer. In this research project, key technologies for the film actuator such as material, design, fabrication, and control techniques are investigated and prototypes of artificial muscle are developed. The following results are obtained in the project.1. Two prototypes of the induction charge film actuator are fabricated. One has 420mum-pitched electrodes and the other has 120mum-pitched electrodes. Both actuators are successfully operated.2. Characteristic of the induction charge actuator is investigated by means of numerical electric field analysis. As a result, the optimum value for the distance between electrodes on the stator and the resistor layer on the slider is found to be 1/5 of the electrode pitch.3. Two prototypes of the electrostatic artificial muscle are constructed using the film actuators with 420mum-pitched and 100mum-pitched electrodes. Better performance is attained by the artificial muscle with electrodes of the smaller pitch. Its force density and power density are 35N/kg and 1W/kg respectively. This force density is comparable to conventional electromagnetic actuators.4. Micro step driving methods are developed. In the induction charge actuator driven by the normal method, the displacement of the slider in one sequence of drive equals to the electrode pitch. The micro step drive reduces the resolution to be less than 1/40 of the electrode pitch.

该研究的目标是通过堆叠薄的薄膜状静电致动器来开发静电人工肌肉，一种具有大力密度的类似肌肉的柔性致动器。静电人造肌肉是由研究人员专门为人造肌肉新开发的感应电荷薄膜致动器构建而成。感应充电薄膜致动器由具有大量条状电极的定子薄膜和涂有高电阻层的滑块薄膜组成。在该研究项目中，研究了薄膜执行器的材料、设计、制造和控制技术等关键技术，并开发了人造肌肉原型。项目取得以下成果： 1．制造了两个感应充电薄膜致动器原型。一种具有 420 微米间距的电极，另一种具有 120 微米间距的电极。两个执行器均成功运行。2．通过数值电场分析研究了感应电荷致动器的特性。结果发现，定子上的电极与滑块上的电阻层之间的距离的最佳值为电极间距的1/5。 3．使用具有 420μm 间距和 100μm 间距电极的薄膜致动器构建了两个静电人工肌肉原型。具有较小间距电极的人造肌肉可以获得更好的性能。其力密度和功率密度分别为35N/kg和1W/kg。该力密度与传统电磁致动器相当。4．开发了微步驱动方法。在采用常规方法驱动的感应充电致动器中，在一系列驱动中滑块的位移等于电极节距。微步驱动将分辨率降低到小于电极间距的1/40。