2D-3D type new oxide superconductor devices

2D-3D型新型氧化物超导器件

• 批准号: 10650056
• 负责人: TAKAI Yoshiaki
• 金额: $ 2.24万
• 依托单位: Nagoya University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10650056/
• 关键词: 2D-3D device; reactive sputtering; Pt; YBCO

We have investigated a new type of superconductor devices, named as 2D-3D type oxide super conducting transistor. The investigation was carried out according to following experimental plans.(1) Development of an RF sputtering system.Usual an RF sputtering systems using co-planar diodes are likely to give severe damages on the super conducting then films, such as an oxygen desorption, deviation from the stoichiometric composition, etc. These structural defects results in poor super conducting properties.In this work, a new system using side-sputtering configuration was developed. This system could diminish the attack of ionized oxygen atoms.By using the side-sputter multi-target an RF sputtering system, we have prepared Pt thin films with a single orientation of (200), instead of (110) orientation easy to grow up.(2) DevicesIn order to develop the 2D-3D type super conductor device, well-oriented two dimensionally conducting super conducting thin films are required. In this work, Y system was adopted. Instead of Bi-system, because of the difficulty to get the super conducting Bi-Sr-Ca-Cu thin films.It was found that the YBCO deposited on the (100) Pt have a c-axis orientation and a high Tc of 85Κ. The orientation of Pt (100) was strongly affected by the presence of oxygen during deposition.The tri-layer structure, Pt-YBCO-Pt was developed and showed good super conducting properties. The property of the tri-layer film showed a promising characteristic of 2D-3D devices.

我们研究了一种新型的超导器件--2D-3D型氧化物超导晶体管。(1)射频溅射系统的研制。通常使用共面二极管的射频溅射系统容易对超导薄膜造成严重的损伤，如氧脱附、偏离化学计量比等。这些结构缺陷导致超导性能较差。利用侧面溅射多靶射频溅射系统，我们制备了单取向(200)取向的铂薄膜，而不是容易生长的(110)取向。(2)器件为了发展2D-3D型超导器件，需要具有良好取向的二维超导薄膜。在本工作中，采用了Y系统。由于制备超导薄膜的难度较大，在(10 0)铂衬底上沉积的YBCO薄膜具有c轴择优取向，T_c高达85Κ。沉积过程中氧的存在对铂(100)晶面的择优取向有很大影响，形成了三层结构的铂-YBCO-铂，表现出良好的超导性能。三层膜的性能表现出了2D-3D器件的良好特性。

项目成果

M. Matsunami: "Energy Loss Distribution of H2ィイD1*ィエD1 with 〜 100 keV in Carbon Films"Nucler Instrument & Methods. B115. 55-57 (.1996)

M. Matsunami：“碳膜中约 100 keV 的 H2D1*D1 能量损失分布”核仪器与方法 B115 (.1996)。

Hisashi Nagai: "Preparation of YBaィイD22ィエD2 CuィイD23ィエD2OィイD27-yィエD2 thin films by metal-organic chemical vapor deposition using liquid-state nonfluorinated sources"Supercond. Sci. Technol.. 10. 213-217 (1997)

Hisashi Nagai：“使用液态非氟化源通过金属有机化学气相沉积制备 YBaiD22D2 CuD23D27-yD2 薄膜”，Supercond。

Hisashi Nagai: "Preparation of YBa_2Cu_3O_<7-y> thin films by metal-organic chemical vapor deposition using ilquid-state nonfluorinated sources"Supercond.Sci.Technol.. 10. 213-217 (1997)

Hisashi Nagai：“使用液态非氟化源通过金属有机化学气相沉积制备 YBa_2Cu_3O_<7-y> 薄膜”Supercond.Sci.Technol.. 10. 213-217 (1997)

K. Sato: "Pulsed laser deposition of BaTiOィイD23ィエD2"Supercond. Sci. Technol.. 9. A156-A160 (1996)

K. Sato：“BaTiO2D2 的脉冲激光沉积”超导技术。9. A156-A160 (1996)

Yutaka Yoshida: "Surface morphology and growth mechanism of YBaィイD22ィエD2 CuィイD23ィエD2OィイD27-yィエD2 thin films by metal-organic chemical vapor deposition using liquid sources"Appl. Phys. Lett.. 69. 845-847 (1996)

Yutaka Yoshida：“使用液体源的金属有机化学气相沉积 YBaiD22D2 CuD23D27-yD2 薄膜的表面形态和生长机制”Appl. Phys. 69. 845-847 (1996)