Study of two-dimensional micro-gyroscopes

二维微陀螺仪的研究

• 批准号: 10650414
• 负责人: MAENAKA Kazusuke
• 金额: $ 2.18万
• 依托单位: Himeji Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10650414/
• 关键词: Angular rate sensor; Gyroscope; Gyro; Micromachining; Two-dimensional

The aim of this study is to realize two-dimensional micro-machined gyroscope (angular rate sensor). At first, we designed and fabricated a basic devices, and evaluated detailed characteristics of them. Then, the modified batch fabrication process including vacuum packaging is investigated. Moreover, an ASIC for the device was designed and fabricated. An outline of the final device is as follows. In the device, the disk-shaped silicon-mass is suspended by four meander springs. This mass is circularly vibrated by comb actuators at fringe of the disk. The applied angular rate creates the Coriolis' force to the mass resulting in the displacement of the mass. This displacement is measured by the capacitance change between the disk and fixed electrode at the glass substrate. The interface ASIC converts this capacitance change into voltage level. The dimension of the final device is 12x12x1.4 mmィイD13ィエD1 including vacuum seal. The linearity and resolution of the system are 1.5%FS and 0.03 deg/s for the angular range of ±250 deg/s.

本研究的目的是实现二维微机械陀螺（角速率传感器）。首先，我们设计并制作了基本器件，并评估了它们的详细特性。然后，改进的批量制造工艺，包括真空封装进行了研究。此外，设计并制作了该器件的专用集成电路。最终器械的概述如下。在该装置中，盘形硅质量块由四个弯曲弹簧悬挂。该质量块通过位于盘边缘的梳状致动器进行循环振动。所施加的角速率对质量产生科里奥利力，导致质量的位移。该位移通过盘与玻璃基板处的固定电极之间的电容变化来测量。接口ASIC将此电容变化转换为电压电平。最终器械的尺寸为12x12x1.4 mm直径D13毫米直径D1，包括真空密封。在±250度/秒的角度范围内，系统的线性度和分辨率分别为1.5%FS和0.03度/秒。

项目成果

K.Maenaka et al.: "Design Problem on Vibratory Micro-Gyroscopes"Trans. on IEE of Japan. 118-E. 377-383 (1998)

K.Maenaka 等人：“振动微陀螺仪的设计问题”Trans。

T.Fujita et al.: "Vacuum sealed Silicon Bulk Micromachined Gyroscope"Dig. of Tech. Paper, The 10th Int. Conf. on Solid-State Sensors and Actuators. 914-917 (1999)

T.Fujita 等人：“真空密封硅体微机械陀螺仪”Dig。

前中一介他: "振動形マイクロジャイロの設計指針" 電学論E. 118-E. 377-384 (1998)

Kazusuke Maenaka 等人：“振动微陀螺仪的设计指南”电气工程 E. 377-384 (1998)

T. Fujita et. al.: "Vacuum Sealed Silicon Bulk Michromachined Gyroscope"Dig, os tech, Papers the 10th Int. Cons of Solid-State Sensors and Actuators. 914-917 (1999)

T.藤田等。

K.Maenaka et al.: "Structure and Characteristics of Silicon Micro-Gyroscope"Tech. Papers on IEICE Japan. EMD99-67. 33-40 (1999)

K.Maenaka 等：“硅微陀螺仪的结构和特性”技术。