Study of two-dimensional micro-gyroscopes

The aim of this study is to realize two-dimensional micromachined gyroscope （angular rate sensor）。At first, we design and fabricated a basic devices，和evaluated detailed characteristics of them. Then，modified batch fabrication process including vacuum packaging is investigated. Moreover，一个ASIC for the device是设计和结构，一个outline of the final device is follows. Inthe device,the disk-shaped silicon-mass is suspended by four meander springs This mass is circularly vibratedcomb actuators at fringe of the disk. the applied angular rate creates the Coriolis' force to themass resulting in the displacement of the mass. This displacement is measured by the capacitance改变disk and fixed electrode at the glass substrate. the interface ASIC converts thiscapacitance change into voltage level. The dimension of The final device is 12x12x1.4 mmincluding vacuum seal. The linearity and resolution of The system are 1.5%FS and 0.03 deg/s for Theangular range of±250 deg/s。

The aim of this study is to realize two-dimensional micro-machined gyroscope (angular rate sensor). At first, we designed and fabricated a basic devices, and evaluated detailed characteristics of them. Then, the modified batch fabrication process including vacuum packaging is investigated. Moreover, an ASIC for the device was designed and fabricated. An outline of the final device is as follows. In the device, the disk-shaped silicon-mass is suspended by four meander springs. This mass is circularly vibrated by comb actuators at fringe of the disk. The applied angular rate creates the Coriolis' force to the mass resulting in the displacement of the mass. This displacement is measured by the capacitance change between the disk and fixed electrode at the glass substrate. The interface ASIC converts this capacitance change into voltage level. The dimension of the final device is 12x12x1.4 mmィイD13ィエD1 including vacuum seal. The linearity and resolution of the system are 1.5%FS and 0.03 deg/s for the angular range of ±250 deg/s.