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Elemental Analysis for Scanning Tunneling Microscope by using X-ray Induced Tunneling Current (Development of Elemental Analysis STM)

利用X射线诱导隧道电流进行扫描隧道显微镜的元素分析（元素分析STM的开发）

基本信息

批准号：
12305008
负责人：
SAKURAI Toshio
金额：
$ 27.59万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (A)
财政年份：
2000
资助国家：
日本
起止时间：
2000 至 2001
项目状态：
已结题

项目摘要

We developed ultra-high vacuum STM equipment, and installed to Synchrotron radiation facility in Tsukuba. Sample chamber was placed on X-Y-Z stage. X-Ray beam (1 x 0.04 mm) irradiated the surface at small incident angles. First, adjustment of sample position was performed. When the x-rays irradiated the sample in the correct way, the STM tip current increases. Therefore, we adjusted the sample position by monitoring this STM tip current. Then, sample cumber was evacuated by rotary pump and turbo-molecular pump. Finally, these pumps were stopped and ion pump was used.Layered samples such as Au (or Ni)- Pt-Si wafer were measured. When the vacuum evaporation of Au, small particles were used as mask, as a result, Au layer with small holes was obtained. This sample is useful to evaluate lateral resolution.When X-rays irradiate the sample, the STM tip current is observed. This current was too small even if synchrotron radiation was applied, several pA. The STM images with and without x-ray irradiation were compared each other. However, clear difference was not observed. The tunneling current was about 0.5 nA, which was considerably larger than x-ray induced STM tip current. We recognized several points that should be improved for the experiments at the Synchrotron radiation facility. We intend to continue this experiment.

我们开发了超高真空STM设备，并安装到筑波的同步加速器辐射设施。样品室放置在 X-Y-Z 台上。 X 射线束 (1 x 0.04 mm) 以小入射角照射表面。首先，进行样品位置的调整。当 X 射线以正确的方式照射样品时，STM 尖端电流会增加。因此，我们通过监测这个STM尖端电流来调整样品位置。然后，通过旋转泵和涡轮分子泵对样品堆进行抽真空。最后，停止这些泵并使用离子泵。测量分层样品，例如Au（或Ni）-Pt-Si晶片。真空蒸镀Au时，采用小颗粒作为掩模，得到具有小孔的Au层。该样品可用于评估横向分辨率。当 X 射线照射样品时，可观察到 STM 尖端电流。即使施加同步辐射，该电流也太小，只有几pA。将有和没有 X 射线照射的 STM 图像相互比较。然而，没有观察到明显的差异。隧道电流约为 0.5 nA，远大于 X 射线感应 STM 尖端电流。我们认识到同步辐射设施的实验需要改进的几个点。我们打算继续这个实验。