Femtosecond Pulsed Laser-Assisted Ultrafine Machining of Chemical Vapor Deposited Diamond Films

飞秒脉冲激光辅助化学气相沉积金刚石薄膜超精细加工

• 批准号: 9622518
• 负责人: Ajay Malshe
• 金额: $ 25万
• 依托单位: University of Arkansas
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-09-15 至 1999-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9622518&HistoricalAwards=false
• 关键词: Femtosecond; Pulsed; Laser; Assisted; Ultrafine

DMI-9622518 Malshe Chemical Vapor Deposited (CVD) diamond deposition has enhanced the operating performance of many existing technological systems for the electronics, optical, computer and mechanical industries. Previously, energy sources such as ions, abrasive, and chemical was considered for post-synthesis finishing and machining of CVD-diamond films. These techniques inevitably lead to contamination and damage to the surfaces and subsurface layers as residual stresses, chemicals residues, and defects. Many of these techniques were based on applying a solid, liquid, or gas polish directly on the substrate. The results of these techniques are slow, thereby resulting in damage and deterioration. This research develops and investigates a novel femtosecond (fs) pulse laser processing technique for ultrafine machining of CVD-diamond films and other CVD-diamond based components. The investigators proposes that the right combination of ultraviolet (UV) wavelength, pulse width, and processing environment with this novel approach will not only refine existing laser-processing techniques, but also surpass all other existing processing techniques in their physico-chemical machining performances. The research task is in collaboration with the Iowa State University.

DMI-9622518 Malshe 化学气相沉积 (CVD) 金刚石沉积增强了电子、光学、计算机和机械行业许多现有技术系统的运行性能。 以前，离子、磨料和化学品等能源被考虑用于 CVD 金刚石薄膜的合成后精加工和加工。 这些技术不可避免地会导致表面和次表面层的污染和损坏，如残余应力、化学残留物和缺陷。 其中许多技术都是基于直接在基材上应用固体、液体或气体抛光剂。 这些技术的结果是缓慢的，从而导致损坏和恶化。 这项研究开发并研究了一种新型飞秒 (fs) 脉冲激光加工技术，用于 CVD 金刚石薄膜和其他 CVD 金刚石基部件的超精细加工。 研究人员提出，紫外线（UV）波长、脉冲宽度和加工环境与这种新颖方法的正确组合不仅将改进现有的激光加工技术，而且在其物理化学加工性能方面也将超越所有其他现有的加工技术。 该研究任务是与爱荷华州立大学合作进行的。