Characterisation, development and application of novel Ion Beam technology (IBT) to enhance the optical thin film manufacturing process
Characterisation, development and application of novel Ion Beam technology (IBT) to enhance the optical thin film manufacturing process
批准号:
LP0347736
负责人:
Prof Ewa Goldys
金额:
$3.87万
依托单位:
依托单位国家:
澳大利亚
项目类别:
Linkage Projects
财政年份:
2003
资助国家:
澳大利亚
项目状态:
已结题
起止时间:
2003-02-28 至 2005-12-31
中文摘要
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英文摘要
Manufacture of optical thin film coatings is a difficult and generally inefficient process undertaken within a vacuum chamber. There are many variables which are not easily controlled nor understood in these complex thermodynamic environments. This project aims to advance core knowledge in three critical areas namely an improved understanding of ion beam physics, new knowledge of the thermodynamic environment used in physical vapour deposition of thin films and new knowedge in the application of Ion beam Technology to optical thin film growth and characteristics.
This project is significant, developing core knowledge and understanding with potential to lead to process efficiency gains, improved optical film characteristics and accessing new areas of research (rf/photoic devices). This project will advance the current state of art in the field of Ion Beam Technology and Ion Beam assisted physical vapour deposition.
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