Development and application of optically-driven micro rotator that rotates inside transparent solid substrate
Development and application of optically-driven micro rotator that rotates inside transparent solid substrate
批准号:
20360115
负责人:
MATSUO Shigeki
金额:
$11.81万
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (B)
财政年份:
2008
资助国家:
日本
项目状态:
已结题
起止时间:
2008 至 2011
中文摘要
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英文摘要
We fabricated an optical rotator that is confined in a microcavity inside a glass substrate, and rotated it by an non-contact technique of optical tweezers. The fabrication technique used consists of two steps :{ micro modification by focused femtosecond laser pulses} and{ selective etching of the modified region}. This is a unique technique that enables us to carry out a removal processing inside transparent solid substrate with a micro-meter resolution. In the present, study we developed such fabrication and rotation techniques.
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Three-Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching after Irradiation of Femtosecond Laser Pulses
飞秒激光脉冲照射后高温蚀刻去除蓝宝石内部三维无残留体积
DOI:
--
发表时间:
2008
期刊:
Laser Chemistry Vol.2008, No.5
影响因子:
--
作者:
[S. Matsuo, K. Tokumi, T. Tomita, and S. Hashimoto]
通讯作者:
and S. Hashimoto
フッ化物結晶のフェムト秒レーザー支援エッチング
氟化物晶体的飞秒激光辅助蚀刻
DOI:
--
发表时间:
2011
期刊:
影响因子:
--
作者:
[松尾繁樹, 他]
通讯作者:
他
フェムト秒レーザを用いた透明固体材料の内部微細加工技術の開発
飞秒激光透明固体材料内部微加工技术开发
DOI:
--
发表时间:
2009
期刊:
影响因子:
--
作者:
[S.Hirata, M.Vach, T.Watanabe, 松尾繁樹]
通讯作者:
松尾繁樹
DOI:
10.2961/jlmn.2010.02.0015
发表时间:
2010
期刊:
Journal of Laser Micro/ Nanoengineering
影响因子:
--
作者:
[K. Tokumi, S. Matsuo, S. Kiyama, T. Tomita and S. Hashimoto]
通讯作者:
T. Tomita and S. Hashimoto
Hashimoto, Three- Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching after Irradiation of Femtosecond Laser Pulses
Hashimoto,飞秒激光脉冲照射后通过高温蚀刻去除蓝宝石内部的三维无残留体积
DOI:
--
发表时间:
2008
期刊:
Laser Chemistry Vol.2008
影响因子:
--
作者:
[S. Matsuo, K. Tokumi, T. Tomita, S.]
通讯作者:
S.
共 36 条
Development of new microprocessing technology of silicon crystalline substrate: internal, three-dimensional, arbitrary-shape removal processing
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批准号:23656109
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项目类别:Grant-in-Aid for Challenging Exploratory Research
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资助金额:$2.58万
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财政年份:2011
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负责人:MATSUO Shigeki
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依托单位:
海外基金