Monolithic integration of multi-wavelength light emitter By vapor-diffusion-dominated selective-area growth

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Selective-area growth (SAG) of InGaN/GaN multiple quantum wells (MQWs), taking advantage of the vapor-phase diffusion of layer precursors with the use of wide (more than 100μm in width) masks, has been investigated in order to achieve in-plane modulation of light-emission wavelength. The mechanism behind such wavelength modulation has been explored through the analysis of the SAG of GaN, InN and InGaN bulk layers. Aiming at a wider range of wavelength modulation, a GaN hexagonal pyramid, with tailored mask width surrounding it, has been adopted and InGaN/GaN MQWs have been grown on the semi-polar surfaces on the pyramids. A multi-wavelength light emitter has been fabricated on the basis of this approach.