A Study of Micro-Accelerometer Using Silicon Ring Resonator

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A concept accelerometer was newly proposed which uses an optical interference of propagated light in Si waveguide. In this sensor, one waveguide of Mach-Zehnder interferometer (MZI) has floating beam structure (air-bridge type) which crosses with a cantilever supporting a proof mass in same plane. When the inertial force is applied to the proof mass, the floating waveguide is expanded and the output of the MZI is modulated. As a result of optical simulation and measurement of fabricated device, optical loss at the intersection of waveguide and supporting cantilever (50μm in width) becomes very small when the f the waveguide at the intersection is Multi-Mode interference (MMI) waveguide. Finally, we confirm the performance of the fabricated accelerometer by measurement of its optical modulation response to applying force.