Development of a practical two-mirror objective with sub-100 nm spatial resolution for soft-X-ray microscopy

软x射线显微镜有望成为一种新型工具，用于观察空间分辨率优于100nm的活体组织的高清晰度图像。在这项研究中，我们开发了一种用于软x射线显微镜的新型反射光学系统。该光学系统由两个非球面反射镜和Mo/Si多层涂层组成，优化后在波长为13 nm处具有最大反射率。通过调整反射镜的不对准来校正光学的波像差，我们确定了最小值为10.6 nm rms。

A soft-X-ray microscope is expected as a novel tool to observe a high definition image of a living tissue with a spatial resolution better than 100 nm. In this study, we develop novel mirror optics for soft-X-ray microscopy. The optics consisted of two aspherical mirrors with a Mo/Si multilayer coating, which was optimized to have a maximum reflectivity at a wavelength of 13 nm. A wave aberration of the optics was corrected by adjusting the mirror misalignments, and we confirmed a minimum value of 10.6 nm rms.