Three dimensional dielectrophoretic devices using high-aspect-ratio structures fabricated by proton beam writing

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Aiming at the development of dielectrophotic(DEP) devices working for three-dimensional trapping of micro particles, we introduced high-aspect-ratio microstructures fabricated by proton beam writing(PBW). Three issues including beam engineering, materials and processing, and device applications have been studied. Using the PBW technique with flexible micromachining capability, superior characteristics of the three-dimensional DEP devices for electric-micro filters have been successfully demonstrated.