Tension-controlled MEMS spatial light modulator by using bionano particles

Generations of crystallization nuclei in amorphous Si thin film are controlled by metal-inducedlateral crystallization (MILC) using Ni nanoparticles (NPs) that are synthesized within cage-shapedprotein,ferritin. Grain size in the crystallized Si film is increased from less than 1 (without MILC) toCrystallization-induced stress （tensile stress）也是由MILC increased by the MILCusing Ni NPs. The tensile stress increases larger with increase in The grain size. Spatial lightmodulators are fabricated with the crystalized Si film. the resonance frequency is increaseddevice operation range是扩展。

Generations of crystallization nuclei in amorphous Si thin film are controlled by metal-induced lateral crystallization (MILC) using Ni nanoparticles (NPs) that are synthesized within cage-shaped protein, ferritin. Grain size in the crystallized Si film is increased from less than 1・m (without MILC) to 20・30・m (with MILC). Crystallization-induced stress (tensile stress) is also increased by the MILC using Ni NPs. The tensile stress increases larger with increase in the grain size. Spatial light modulators are fabricated with the crystalized Si film. The resonance frequency is increased and device operation range is extended.