Clarification of Rolling Frictional Behavior in 0.1nm Displacement Area and Application to Ultra-precision Positioning Control

针对滚珠直线导轨定位装置，利用多方程摩擦模型进行摩擦补偿，以提高定位精度。进行了摩擦学模型参数估计实验。结果表明，直线滚珠导轨在10nm左右的微小位移范围内具有很强的非线性。此外，直线滚珠导轨对进给速度的依赖特性也变得清晰。

This study aims to improve positioning accuracy by frictional compensation using frictional model with several equations for positioning device with linear ball guide ways. Experiment of estimating parameters is carried out for modeling frictional behavior. As the result, the linear ball guide ways have strong nonlinearity in minute displacement like amplitude of 10nm. Moreover, the characteristic depending on feeding velocity of linear ball guide ways become clear.