Development of novel function-controlled inorganic/organic layer-formationtechnology through integrated reaction studies on plasma interactions withnanolayers at surface and interface

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This research project has been carried out to seek for breakthroughs toovercome constraints involved in plasma processes for formation of functional inorganic layeron organic layer through integrated reaction studies on plasma interactions with nanolayers atsurface and interface. The results obtained from this project have indicated feasibility of lowdamage plasma process to reduce the damage-layer thickness as thin as a few nm especiallyvia controlling the energy of ion bombardment during the reactive plasma process.