NEMS-LSI-based tunable color filter with high optical efficiency and low power consumption

我们研制了一种基于亚波长铝（Al）光栅的透射型彩色滤光片，用于NEMS可变彩色滤光片，具有高的光学效率和低的功耗。在通孔上部署Al纳米线阵列。采用电子束直写构图和剥离技术制作了亚波长铝光栅。通过增大亚波长光栅的差距，使透射光的峰值波长发生红移，从而实现RGB颜色的表达。峰值波长的最大测量透射光强度为56%，这是固定在体基板上的常规滤色器的等效值。实验测得的透射光峰值波长与理论值一致。所提出的RGB彩色滤光片具有潜在的应用，可调谐全色滤波器的基础上的表面等离子体。

We have developed transmission color filters based on a subwavelength aluminum (Al) grating for NEMS variable color filter with high optical efficiency and low power consumption. An array of Al nanowires was deployed over a through hole. The subwavelength Al grating was patterned by EB direct writing and formed by liftoff technique. The peak wavelength of the transmitted light was red-shifted by increasing the gap of the subwavelength grating, and RGB color was expressed. The maximum measured transmitted light intensity of the peak wavelength was 56% which is equivalent value of conventional color filters fixed on a bulk substrate. The experimentally obtained peak wavelengths of the transmitted light agreed with the theoretical values. The proposed RGB color filters have potential application as tunable full color filters based on surface plasmon.