Development of MEMS Tunable Color Filter Based on Sub-wavelength Grating

基于亚波长光栅的MEMS可调谐彩色滤光片的研制

• 批准号: 21810013
• 负责人: TAKAHASHI Kazuhiro
• 金额: $ 1.71万
• 依托单位: Toyohashi University of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Research Activity Start-up
• 财政年份: 2009
• 资助国家: 日本
• 起止时间: 2009 至 2010
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-21810013/
• 关键词: NEMS; MEMS; サブ波長格子; ナノフォトニクス; CMOS集積回路; 静電アクチュエータ; 構造色; NEMS/MEMS; LSI-MEMS集積化; 導波モード共鳴

We propose a MEMS (Micro Electro Mechanical Systems) tunable color filter using sub-wavelength grating, which can modulate the reflected light by changing the period of the sub-wavelength grating pixel by means of electrostatic actuation. We report the mechanical design of the MEMS actuator, optical design of the sub-wavelength grating, and device fabrication technique using a semiconductor technology. The MEMS electrostatic actuator could be designed a high mechanical resonance frequency with a relatively low drive voltage. The structural color was found from the fabricated sub-wavelength grating integrated with the MEMS actuator on a silicon wafer. The color tuning from yellow to green was demonstrated by voltage operation. We also developed a monolithic integration technique of the MEMS tunable color filter and LSI circuits. The fabricated driver circuits were successfully operated.

提出了一种基于亚波长光栅的MEMS（微机电系统）可调谐滤色器，该滤色器可以通过静电驱动改变亚波长光栅像素的周期来调制反射光。我们报告了MEMS致动器的机械设计，亚波长光栅的光学设计，以及采用半导体技术的器件制造技术。MEMS静电致动器可以在较低的驱动电压下实现较高的机械谐振频率。在硅片上与MEMS致动器集成的亚波长光栅中发现了结构颜色。通过电压操作证明了从黄色到绿色的颜色调谐。我们还开发了MEMS可调谐滤波器和LSI电路的单片集成技术。所制备的驱动电路运行成功。

项目成果

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A wafer-level system integration technology for flexible pseudo-SOC incorporates MEMS-CMOS heterogeneous devices

柔性伪 SOC 的晶圆级系统集成技术采用 MEMS-CMOS 异构器件

• 发表时间: 2010
• 作者: H.Yamada;Y.Onozuka;A.Iida;K.Itaya;H.Funaki;K.Takahashi;H.Toshiyoshi
• 通讯作者: H.Toshiyoshi

A CMOS Compatible Low Temperature Process for Photonic Crystal MEMS Scanner

一种用于光子晶体 MEMS 扫描仪的 CMOS 兼容低温工艺

• 发表时间: 2009
• 作者: K.Takahashi;I.W.Jung;A.Higo;Y.Mita;H.Fujita;H.Toshiyoshi;O.Solgaard
• 通讯作者: O.Solgaard

サブ波長格子及び表示装置

亚波长光栅及显示装置

• 发表时间: 2009

A MEMS Digital Mirror Array Integrated with High-Voltage Level-Shifter

集成高压电平转换器的MEMS数字镜阵列

• 发表时间: 2009
• 作者: S.Maruyama;K.Takahashi;H.Fujita;H.Toshiyoshi
• 通讯作者: H.Toshiyoshi