Development of MEMS Tunable Color Filter Based on Sub-wavelength Grating

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We propose a MEMS (Micro Electro Mechanical Systems) tunable color filter using sub-wavelength grating, which can modulate the reflected light by changing the period of the sub-wavelength grating pixel by means of electrostatic actuation. We report the mechanical design of the MEMS actuator, optical design of the sub-wavelength grating, and device fabrication technique using a semiconductor technology. The MEMS electrostatic actuator could be designed a high mechanical resonance frequency with a relatively low drive voltage. The structural color was found from the fabricated sub-wavelength grating integrated with the MEMS actuator on a silicon wafer. The color tuning from yellow to green was demonstrated by voltage operation. We also developed a monolithic integration technique of the MEMS tunable color filter and LSI circuits. The fabricated driver circuits were successfully operated.