CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing

基石：光电、超材料、纳米技术和传感能力

• 批准号: EP/L021129/1
• 负责人: Graham Reed
• 金额: $ 288.88万
• 依托单位: University of Southampton
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2014
• 资助国家: 英国
• 起止时间: 2014 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FL021129%2F1
• 关键词: CORNERSTONE; Capability; OptoelectRoNics; mEtamateRialS; nanoTechnOlogy

This proposal seeks funding to acquire a stepper and associated wafer coater, tools to enable photolithographic patterning of semiconductor wafers for device and circuit fabrication. The stepper will be located at Southampton University in the recent £120m cleanroom complex. It will relieve the bottleneck within the cleanroom, an electron beam lithography tool, which is a slower alternative patterning tool. This will increase capacity within the cleanroom complex and facilitate and underpin a wealth of world class research. Not only will research at Southampton be enhanced, but Southampton (SOU), Glasgow (GLA), and Surrey (SUR) universities will pool resources to establish a Silicon Photonics Fabrication Capability within the UK, to facilitate an increasing demand for the fabrication of Silicon Photonics devices from the UK's premier researchers. This will encourage wider usage of world class equipment within the UK, in line with EPSRC policy. We seek funding for both the equipment and 3.5 RAs across the 3 institutions, over a 4 year period, to establish and deliver the Capability. Access to a very significant inventory of additional equipment at these 3 universities will be facilitated. The Capability is extremely timely, as silicon foundry services around the world are moving towards a model in which standard platforms and devices will be offered, making it more difficult for researchers to carry out innovative work at the device level, or in non-standard platforms.The proposal is supported by 36 members of academic staff at Southampton, with a total current research portfolio of projects valued in excess of £88m. Furthermore we have 10 project partners who will take part in the use and assessment of the silicon photonics capability by designing and subsequently testing fabricated devices. Their total in-kind contribution is valued at £793,300. These partners have expressed an interest in using the capability after the project has been completed. In addition we have contacted a few example potential users from within the industrial sector (SMEs), and from around the world who have also provided letters of support indicating that they would use the capability after the project is complete. Taking this net proposed usage, it is clear that the equipment will be sustained beyond the period of the funded project. The Southampton users alone need only generate a tiny fraction (0.2%) of their research portfolio to cover running costs and depreciation. Consumables will increase with usage, but clearly, the silicon photonics capability will generate paying users, to further sustain the capability beyond the project, which will, in turn, allow UK researchers to compete effectively on the world stage in the buoyant field of silicon photonics. Beyond the 4 year project, the Silicon Photonics Capability will be operated by the commercial arms of the 3 partner universities, all of whom have provided letters of support confirming their ongoing participation.

该提案寻求资金，以获得步进机和相关的晶圆涂布机，工具，使半导体晶圆的光刻图案的设备和电路制造。步进机将位于南安普顿大学最近耗资1.2亿英镑的洁净室综合体中。它将缓解洁净室内的瓶颈，电子束光刻工具，这是一种较慢的替代图案化工具。这将增加洁净室综合体的能力，促进和支持世界级的研究。不仅南安普顿的研究将得到加强，而且南安普顿（SOU），格拉斯哥（GLA）和萨里（SUR）大学将集中资源在英国建立硅光子制造能力，以促进对英国顶级研究人员制造硅光子器件的需求不断增长。这将鼓励在英国更广泛地使用世界一流的设备，符合EPSRC的政策。我们寻求资金的设备和3.5 RA在3个机构，在4年的时间内，建立和提供的能力。将便利获得这三所大学的大量额外设备库存。该能力是非常及时的，因为世界各地的硅代工服务正在转向一种模式，其中标准平台和设备将提供，使研究人员更难在设备水平上进行创新工作，或在非标准平台。该提案得到了南安普顿36名学术人员的支持，目前总的研究项目组合价值超过8800万英镑。此外，我们还有10个项目合作伙伴，他们将通过设计和随后测试制造的器件来参与硅光子学能力的使用和评估。他们的实物捐助总额为793 300英镑。这些合作伙伴表示有兴趣在项目完成后使用这一能力。此外，我们还联系了一些来自工业部门（中小企业）和世界各地的潜在用户，他们也提供了支持信，表明他们将在项目完成后使用该功能。根据这一拟议净使用量，显然这些设备将在供资项目结束后继续使用。仅南安普顿的用户只需产生其研究组合的一小部分（0.2%），以支付运行成本和折旧。消耗品将随着使用量的增加而增加，但显然，硅光子学的能力将产生付费用户，以进一步维持项目之外的能力，这反过来将使英国研究人员能够在硅光子学的蓬勃发展领域的世界舞台上有效竞争。在为期4年的项目之后，硅光子学能力将由3所合作大学的商业部门运营，所有这些大学都提供了支持信，确认他们正在参与。

项目成果

Low propagation loss Ge-on-Si waveguides and their dependency on processing methods

低传播损耗硅基锗波导及其对加工方法的依赖性

• DOI: 10.1109/cleopr.2017.8118738
• 发表时间: 2017
• 作者: Anantha P

Low-Temperature NH3-Free Silicon Nitride Platforms for Integrated Photonics

用于集成光子学的低温无 NH3 氮化硅平台

• DOI: 10.1109/group4.2018.8478748
• 发表时间: 2018
• 作者: Bucio T

Compact, Ultra-Tunable InGaSb/AlGaAsSb Si External Cavity Laser at the Mid-Infrared (MIR)

• DOI: 10.23919/cleo.2019.8749759
• 发表时间: 2019-05
• 期刊: 2019 Conference on Lasers and Electro-Optics (CLEO)
• 作者: Jia Xu Brian Sia;Wanjun Wang;Z. Qiao;Xiang Li;Xin Guo;Jin Zhou;Zecen Zhang;C. Littlejohns;Chongyang Liu;G. Reed;Hong Wang

High Speed Silicon Capacitor Modulators for TM Polarisation

用于 TM 偏振的高速硅电容调制器

• DOI: 10.1109/group4.2019.8853906
• 发表时间: 2019
• 作者: Banakar M

Sub-kHz linewidth, hybrid III-V/silicon wavelength-tunable laser diode operating at the application-rich 1647-1690 nm.

• DOI: 10.1364/oe.400666
• 发表时间: 2020-08
• 期刊: Optics express
• 影响因子: 3.8
• 作者: Jia Xu Brian Sia;Xiang Li;Wanjun Wang;Z. Qiao;Xin Guo;Jin Zhou;C. Littlejohns;Chongyang Liu;G. Reed;Hong Wang