Development of actuators for precision and microsystems applications

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The research program is motivated by many industrial applications that require the development of novel actuator concepts and their use in developing multi-axis positioners offering nanometer accuracy, Micro Electro Mechanical Systems for wireless applications, and micro actuators for dispensing and fluid manipulation tasks in biomedical testing. Specifically, the program focuses on three main tasks and is based on major contributions developed within the research group:1.Based on research done by the group on piezoceramic (PZT) characterization and linear motor design, the research will establish real-time compensation algorithms for non-linear effects in PZT actuators for applications in the KHz frequency range and develop novel designs of PZT actuated linear positioners offering nanometer accuracy.2.Activities within the group in the area of microfluidics led to developing novel micropumps, dispensing arrays and mixing chambers. Future work will pursue developing a microfluidic development and testing infrastructure that facilitates the integration of micro-machining technology, micro actuation/sensing and microhydraulic concepts to develop lab-on-a-chip devices that integrate the critical microfluidic components needed for various fluid handling protocols and the production of high-density DNA and protein slides. This includes developing an understanding of PZT thin film actuators and their integration into MEMS devices, and developing high precision (picoliter range) dispensing heads using thin film PZT and electrostatic actuators.3.The research group has developed a novel two-layer bi-directional MEMS electrostatic actuator that offers a stroke that is 5 times higher than conventional actuators. The novel actuator can be fabricated using standard micromachining processes. Future work will focus on establishing designs, fabrication and packaging of high performance RF MEMS tunable capacitors for next generation wireless communication systems based on the developed actuator platform.