Development of actuators for precision and microsystems applications

开发用于精密和微系统应用的执行器

• 批准号: 203102-2007
• 负责人: BenMrad, Ridha
• 金额: $ 2.11万
• 依托单位: University of Toronto
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2007
• 资助国家: 加拿大
• 起止时间: 2007-01-01 至 2008-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=365625
• 关键词: Development; actuators; precision; microsystems; applications

The research program is motivated by many industrial applications that require the development of novel actuator concepts and their use in developing multi-axis positioners offering nanometer accuracy, Micro Electro Mechanical Systems for wireless applications, and micro actuators for dispensing and fluid manipulation tasks in biomedical testing. Specifically, the program focuses on three main tasks and is based on major contributions developed within the research group:1.Based on research done by the group on piezoceramic (PZT) characterization and linear motor design, the research will establish real-time compensation algorithms for non-linear effects in PZT actuators for applications in the KHz frequency range and develop novel designs of PZT actuated linear positioners offering nanometer accuracy.2.Activities within the group in the area of microfluidics led to developing novel micropumps, dispensing arrays and mixing chambers. Future work will pursue developing a microfluidic development and testing infrastructure that facilitates the integration of micro-machining technology, micro actuation/sensing and microhydraulic concepts to develop lab-on-a-chip devices that integrate the critical microfluidic components needed for various fluid handling protocols and the production of high-density DNA and protein slides. This includes developing an understanding of PZT thin film actuators and their integration into MEMS devices, and developing high precision (picoliter range) dispensing heads using thin film PZT and electrostatic actuators.3.The research group has developed a novel two-layer bi-directional MEMS electrostatic actuator that offers a stroke that is 5 times higher than conventional actuators. The novel actuator can be fabricated using standard micromachining processes. Future work will focus on establishing designs, fabrication and packaging of high performance RF MEMS tunable capacitors for next generation wireless communication systems based on the developed actuator platform.

该研究计划的动机是许多工业应用，需要开发新的致动器概念及其在开发多轴定位器中的应用，这些定位器提供纳米精度，用于无线应用的微机电系统，以及用于生物医学测试中的点胶和流体操作任务的微致动器。具体而言，该计划侧重于三个主要任务，并基于研究小组的主要贡献：1.基于压电陶瓷（PZT）特性和线性电机设计小组所做的研究，该研究将建立用于KHz频率范围内应用的PZT致动器非线性效应的实时补偿算法，并开发具有纳米精度的PZT致动线性定位器的新设计。2.该小组在微流体领域的活动导致开发新型微型泵，点胶阵列和混合室。未来的工作将致力于开发微流体开发和测试基础设施，促进微机械加工技术，微驱动/传感和微液压概念的集成，以开发集成各种流体处理协议所需的关键微流体组件的芯片实验室设备，并生产高密度DNA和蛋白质载玻片。这包括了解PZT薄膜致动器及其集成到MEMS器件中，以及使用薄膜PZT和静电致动器开发高精度（皮升范围）点胶头。3.该研究小组开发了一种新型的双层双向MEMS静电致动器，其行程是传统致动器的5倍。新型致动器可以使用标准的微机械加工工艺制造。未来的工作将集中在建立高性能RF MEMS可调谐电容器的设计，制造和封装的基础上开发的致动器平台的下一代无线通信系统。