A high performance MEMS platform for actuation and sensing

我们最近在我们的研究小组中开发了一种超薄（0.5毫米）新颖的3自由度微静电致动器平台，并通过初步实施的例子展示了它作为一个平台的潜力，可以解决微静电致动器长期存在的问题，以及它作为高性能微加速度计和力微传感器的用途。制造并测试了微致动器平台，以演示大的力产生和操作，最大质量为100毫克，行程为100微米。该技术需要进一步发展，以实现自动对焦（AF）和光学图像稳定（OIS）在智能手机相机。待开发的相机模块使用新型致动器来实现基于沿光轴平移和沿与图像传感器光轴垂直的轴形成平面的2轴旋转的自动对焦。使用图像传感器驱动实现自动对焦提供了几乎即时对焦，相机在很短的时间内将焦点从一个场景切换到另一个场景。另一个优点是执行器的高分辨率（±1µm），而不是目前广泛使用的电磁音圈电机技术（VCM）的±10µm分辨率。这种高分辨率使得使用大光圈相机可以让更多的光线进入图像传感器。OIS特性将通过使用第二个微致动器作用于镜头筒来实现。

We have recently developed in our research group an ultra-thin (0.5 mm) novel 3-degrees-of-freedom micro-electrostatic actuator platform and shown through initial implementation examples its potential as a platform that can address long standing problems of micro electrostatic actuators as well as its use as a high performance micro accelerometer and force micro sensor. The micro actuator platform was fabricated and tested to demonstrate large force generation and manipulation of up to 100 milligram size masses and a stroke of 100 µm. Further development of the technology is needed for its implementation for autofocus (AF) and optical image stabilization (OIS) in smart phone cameras. The camera modules to be developed use the novel actuator to achieve AF based on translation along the optical axis and 2 axis rotation along axes forming the plane perpendicular to the optical axis of the image sensor. Achieving AF using image sensor actuation provides almost instant focus in which the camera switches the focus form one scene to another in a very short time. Another advantage is the high resolution (±1µm) of the actuator as opposed to ±10 µm resolution of the currently widely used electromagnetic Voice Coil motor technology (VCM). This high resolution enables the use of large aperture cameras which allow more light to enter the image sensor. The OIS feature will be pursued by acting on the lens barrel by using a second micro actuator.