A high performance MEMS platform for actuation and sensing

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We have recently developed in our research group an ultra-thin (0.5 mm) novel 3-degrees-of-freedom micro-electrostatic actuator platform and shown through initial implementation examples its potential as a platform that can address long standing problems of micro electrostatic actuators as well as its use as a high performance micro accelerometer and force micro sensor. The micro actuator platform was fabricated and tested to demonstrate large force generation and manipulation of up to 100 milligram size masses and a stroke of 100 µm. Further development of the technology is needed for its implementation for autofocus (AF) and optical image stabilization (OIS) in smart phone cameras. The camera modules to be developed use the novel actuator to achieve AF based on translation along the optical axis and 2 axis rotation along axes forming the plane perpendicular to the optical axis of the image sensor. Achieving AF using image sensor actuation provides almost instant focus in which the camera switches the focus form one scene to another in a very short time. Another advantage is the high resolution (±1µm) of the actuator as opposed to ±10 µm resolution of the currently widely used electromagnetic Voice Coil motor technology (VCM). This high resolution enables the use of large aperture cameras which allow more light to enter the image sensor. The OIS feature will be pursued by acting on the lens barrel by using a second micro actuator.