Development of actuators for precision and microsystems applications and high output power density energy harvesting technology

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The research program is motivated by many industrial applications that require the development of novel actuators with enhanced performance: 1. Requirements for large stroke (up to 50-100 mm) and nanometer accuracy in many emerging positioning applications including biomedical testing, nanofabrication, and optics; 2. The need for novel MEMS actuators that offer large stroke (20-100 micrometers), reliability and ease of fabrication using standard surface micromachining processes for display systems; 3. The need for a new generation of actuators that can provide low RPM and high torque and that are easy to integrate into systems without speed reduction mechanisms. These new actuator would find applications in a large array of industries especially in transportation systems. Specifically, the work will focus on: