Development of actuators for precision and microsystems applications and high output power density energy harvesting technology

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The research program is motivated by many industrial applications that require the development of novel actuators with enhanced performance: 1. Requirements for large stroke (up to 50-100 mm) and nanometer accuracy in many emerging positioning applications including biomedical testing, nanofabrication, and optics; 2. The need for novel MEMS actuators that offer large stroke (20-100 micrometers), reliability and ease of fabrication using standard surface micromachining processes for display systems; 3. The need for a new generation of actuators that can provide low RPM and high torque and that are easy to integrate into systems without speed reduction mechanisms. These new actuator would find applications in a large array of industries especially in transportation systems. Specifically, the work will focus on: 1. Compact XYZ precision stages that offer high stiffness, up to 50 mm/sec speed and 5 nm accuracy. The novel designs will integrate MEMS features to enhance the friction characteristics of the contact surfaces, embed thin film based technology in the structure to enhance the motors control; 2. Procedures to integrate PZT thin film into MEMS and precision systems; 3. MEMS electrostatic actuators to integrate micromirrors and optical lenses. The focus will be on microfabrication procedures leading to high quality mirror surfaces, lower voltage requirements and packaging and integration with control circuits; 4. A new class of high performance mini-actuators that combine smart materials (i.e. both bulk and thin film piezoceramics) with MEMS features leading to high torque and low RPM actuators and no speed reduction mechanisms. This new class of actuators is expected to replace a large array of actuators that are being used today which require speed/torque transformers for integration into systems; 5. Piezo energy harvesting technology that maximizes output power density. Various forms of ceramics (i.e. bulk, single crystal and nanofibers) will be pursued and tested in various design configurations.