Development of actuators for precision and microsystems applications and high output power density energy harvesting technology

该研究计划的动机是许多工业应用，需要开发具有增强性能的新型执行器：1。在许多新兴的定位应用中，包括生物医学测试、纳米制造和光学，需要大行程（高达50-100 mm）和纳米精度; 2.需要新的MEMS致动器，提供大行程（20-100微米），可靠性和易于制造，使用标准的表面微加工工艺的显示系统; 3。需要新一代执行器，能够提供低转速和高扭矩，并且易于集成到系统中，无需减速机构。这些新的致动器将在大量的行业，特别是在运输系统中找到应用。具体而言，工作将侧重于：

The research program is motivated by many industrial applications that require the development of novel actuators with enhanced performance: 1. Requirements for large stroke (up to 50-100 mm) and nanometer accuracy in many emerging positioning applications including biomedical testing, nanofabrication, and optics; 2. The need for novel MEMS actuators that offer large stroke (20-100 micrometers), reliability and ease of fabrication using standard surface micromachining processes for display systems; 3. The need for a new generation of actuators that can provide low RPM and high torque and that are easy to integrate into systems without speed reduction mechanisms. These new actuator would find applications in a large array of industries especially in transportation systems. Specifically, the work will focus on: