Development of actuators for precision and microsystems applications and high output power density energy harvesting technology

研究计划的动机是许多工业应用，这些应用需要开发具有更高性能的新型执行器：1.在许多新兴的定位应用中，包括生物医学测试、纳米制造和光学应用，对大行程(高达50-100 mm)和纳米精度的要求；2.对提供大行程(20-100微米)、可靠性和易于制造的新型MEMS执行器的需求；3.针对显示系统的标准表面微加工工艺；3.需要新一代执行器，能够提供低转速、高扭矩，并且易于集成到系统中，而不需要减速机构。这些新的执行器将在许多行业中得到应用，特别是在交通系统中。具体地说，工作重点是：

The research program is motivated by many industrial applications that require the development of novel actuators with enhanced performance: 1. Requirements for large stroke (up to 50-100 mm) and nanometer accuracy in many emerging positioning applications including biomedical testing, nanofabrication, and optics; 2. The need for novel MEMS actuators that offer large stroke (20-100 micrometers), reliability and ease of fabrication using standard surface micromachining processes for display systems; 3. The need for a new generation of actuators that can provide low RPM and high torque and that are easy to integrate into systems without speed reduction mechanisms. These new actuator would find applications in a large array of industries especially in transportation systems. Specifically, the work will focus on: