Development of MEMS mirror for a LiDAR system used in urban rail and transportation

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DASAEROSPACE is developing a LiDAR system for use in urban rail, autonomous vehicles and mobilerobots. A collaboration with the University of Toronto Mechatronics and Microsystems Design research groupis being sought to develop a 2-axis MEMS mirror which will be utilized in the scanning mechanism of theLiDAR system. The development of a MEMS mirror is critical to the success of the LiDAR system and atpresent there is no such mirror available on the market which satisfies all the system requirements. Thecompany is currently using commercial-off-the-shelf MEMS mirrors which offer limited capabilities in termsof range, resolution, and field of view. The focus of this Engage project is to developed the fast-tilting MEMSmirror of the largest possible size (aperture) and with the widest possible tilt angles. The mirror should besuitable for serial manufacturing and should withstand environmental factors such as vibration and temperaturefluctuations. The key desired mirror specifications are as follows: 1.Aperture: ~10 mm; 2.Tilt angles 2D: +/-30 deg. (mechanical) along the inplane X and Y axes; 3. Frequency: >1 kHz (fast axis), > 5 Hz (slow axis).