Development of MEMS mirror for a LiDAR system used in urban rail and transportation

DASAEROSPACE正在开发一种用于城市轨道交通、自动驾驶车辆和移动机器人的激光雷达系统。正在寻求与多伦多大学机电一体化和微系统设计研究小组合作开发一种两轴MEMS反射镜，该反射镜将用于LiDAR系统的扫描机构。MEMS反射镜的研制对激光雷达系统的成功至关重要，目前市场上还没有满足所有系统要求的MEMS反射镜。该公司目前正在使用商用现成的MEMS反射镜，这些反射镜在范围、分辨率和视野方面提供的能力有限。该项目的重点是开发最大尺寸(光圈)和最宽倾斜角的快速倾斜MEMS反射镜。反射镜应适合于连续制造，并应能承受振动和温度波动等环境因素。反射镜的主要技术指标如下：1.孔径：~10 mm；2.倾角2D：/-30°。(机械)沿平面内X和Y轴；3.频率：&gt；1 khz(快轴)，&gt；5 hz(慢轴)。

DASAEROSPACE is developing a LiDAR system for use in urban rail, autonomous vehicles and mobilerobots. A collaboration with the University of Toronto Mechatronics and Microsystems Design research groupis being sought to develop a 2-axis MEMS mirror which will be utilized in the scanning mechanism of theLiDAR system. The development of a MEMS mirror is critical to the success of the LiDAR system and atpresent there is no such mirror available on the market which satisfies all the system requirements. Thecompany is currently using commercial-off-the-shelf MEMS mirrors which offer limited capabilities in termsof range, resolution, and field of view. The focus of this Engage project is to developed the fast-tilting MEMSmirror of the largest possible size (aperture) and with the widest possible tilt angles. The mirror should besuitable for serial manufacturing and should withstand environmental factors such as vibration and temperaturefluctuations. The key desired mirror specifications are as follows: 1.Aperture: ~10 mm; 2.Tilt angles 2D: +/-30 deg. (mechanical) along the inplane X and Y axes; 3. Frequency: >1 kHz (fast axis), > 5 Hz (slow axis).