Development of MEMS mirror for a LiDAR system used in urban rail and transportation

为城市轨道交通激光雷达系统开发MEMS反射镜

• 批准号: 508820-2017
• 负责人: BenMrad, Ridha
• 金额: $ 1.82万
• 依托单位: University of Toronto
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=640012
• 关键词: Development; MEMS; mirror; LiDAR; system

DASAEROSPACE is developing a LiDAR system for use in urban rail, autonomous vehicles and mobilerobots. A collaboration with the University of Toronto Mechatronics and Microsystems Design research groupis being sought to develop a 2-axis MEMS mirror which will be utilized in the scanning mechanism of theLiDAR system. The development of a MEMS mirror is critical to the success of the LiDAR system and atpresent there is no such mirror available on the market which satisfies all the system requirements. Thecompany is currently using commercial-off-the-shelf MEMS mirrors which offer limited capabilities in termsof range, resolution, and field of view. The focus of this Engage project is to developed the fast-tilting MEMSmirror of the largest possible size (aperture) and with the widest possible tilt angles. The mirror should besuitable for serial manufacturing and should withstand environmental factors such as vibration and temperaturefluctuations. The key desired mirror specifications are as follows: 1.Aperture: ~10 mm; 2.Tilt angles 2D: +/-30 deg. (mechanical) along the inplane X and Y axes; 3. Frequency: >1 kHz (fast axis), > 5 Hz (slow axis).

DASAEROSPACE正在开发用于城市轨道、自动驾驶汽车和移动机器人的LiDAR系统。与多伦多大学机电和微系统设计研究小组的合作正在寻求开发一个2轴MEMS镜，将用于激光雷达系统的扫描机制。MEMS反射镜的开发对于LiDAR系统的成功至关重要，目前市场上还没有满足所有系统要求的MEMS反射镜。该公司目前使用的是商业现成的MEMS反射镜，其在范围、分辨率和视野方面的能力有限。Engage项目的重点是开发尽可能大的尺寸（孔径）和尽可能宽的倾斜角度的快速倾斜MEMS反射镜。反射镜应适合于批量生产，并应承受环境因素，如振动和温度波动。关键的所需反射镜规格如下：1.孔径：~10 mm; 2.直角2D：+/-30度。（机械）沿着平面内X和Y轴; 3.频率：>1 kHz（快轴），> 5 Hz（慢轴）。