Micro thermal analysis for MEMS, micromachining process, and system-on-a-chip
Micro thermal analysis for MEMS, micromachining process, and system-on-a-chip
批准号:
374904-2009
负责人:
Takahata, Kenichi
金额:
$6.19万
依托单位国家:
加拿大
项目类别:
Research Tools and Instruments - Category 1 (<$150,000)
财政年份:
2008
资助国家:
加拿大
项目状态:
已结题
起止时间:
2008-01-01 至 2009-12-31
中文摘要
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英文摘要
The proposed research program will explore a variety of electrothermally controlled micro-electro-mechanical systems (MEMS) and micromachining methods as well as thermal methodologies for testing of very large scale integrated circuits and System-on-a-Chip (SoC). The applications of the MEMS and micromachining include implantable devices and microfluidic BioMEMS that are to offer novel diagnostic and therapeutic means for chronic and life-threatening diseases such as cancers and cardiovascular disease, contributing to saving lives and improving quality of life for Canadians and people around the world.
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依托单位:
国内基金
海外基金
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