Micro thermal analysis for MEMS, micromachining process, and system-on-a-chip

MEMS、微加工工艺和片上系统的微热分析

• 批准号: 374904-2009
• 负责人: Takahata, Kenichi
• 金额: $ 6.19万
• 依托单位: University of British Columbia
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2008
• 资助国家: 加拿大
• 起止时间: 2008-01-01 至 2009-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=412038
• 关键词: Micro; thermal; analysis; MEMS; micromachining

The proposed research program will explore a variety of electrothermally controlled micro-electro-mechanical systems (MEMS) and micromachining methods as well as thermal methodologies for testing of very large scale integrated circuits and System-on-a-Chip (SoC). The applications of the MEMS and micromachining include implantable devices and microfluidic BioMEMS that are to offer novel diagnostic and therapeutic means for chronic and life-threatening diseases such as cancers and cardiovascular disease, contributing to saving lives and improving quality of life for Canadians and people around the world.

拟议的研究计划将探索各种电热控制的微机电系统（MEMS）和微加工方法，以及用于测试超大规模集成电路和片上系统（SoC）的热方法。MEMS和微机械加工的应用包括可植入设备和微流体BioMEMS，为癌症和心血管疾病等慢性和危及生命的疾病提供新的诊断和治疗手段，为挽救加拿大人和世界各地人民的生命和提高生活质量做出贡献。