Rapid microfabrication of microsystems for ultrasound imaging and mechanical signal processing

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This research program focuses on the synergic combination of innovations at the theoretical level and their implementation in low-cost microstructure arrays fabricated through rapid micromachining (e.g. maskless grayscale lithography, inkjet microprinting, laser micromachining). It complements a recently awarded major CFI national grant that strongly enhances the existing infrastructure for rapid fabrication at UBC. On the technology side, the objective is to develop reliable rapid fabrication processes for in-plane and out-of-plane arrays of microelectromechanical structures, defined on large areas (compared to present die sizes) and on flexible substrates. The focus will be mainly on polymer-based technologies, while a longer objective is to incorporate as well processing modules related to microfabrication of ceramic-based compounds, and integration with organic electronic devices. 2D arrays of in-plane, coupled movable microstructures will exploit the large area attribute for generating equivalent signal processing functions (filtering) in the mechanical domain, analogous to lattice filters or analog cellular automata. The electromechanical coupling adds programmability to the specific features of the mechanical filters, with target applications in the field of real-time spectrum analysis. The flexible substrate feature will be exploited in a second target application, where 2D arrays of polymer CMUT (Capacitive Micromachined Ultrasonic Transducer) elements, moving out-of-plane, will be the key element for building an endoscopic ultrasound imaging system for cancer detection. Pancreatic cancer is common and highly lethal, with the only chance of long-term survival depending on an early complete resection. Endoscopic ultrasound has already proven to have the highest sensitivity in detecting pancreatic tumors, but the performance of the transducer head can still be improved. Moreover, the 2D polymer CMUT array enables low-cost 3D ultrasound imaging systems, giving new valuable insights. The short theory - experiment cycle is attractive for HQPs, and promises to bring a fast pace of evolution and a deeper insight, with noticeable effects on their future career.