Rapid microfabrication of microsystems for ultrasound imaging and mechanical signal processing

该研究计划的重点是在理论层面上的创新的协同组合，并通过快速微加工（例如无掩模灰度光刻，喷墨微印刷，激光微加工）制造的低成本微结构阵列的实施。它补充了最近授予的CFI国家补助金，该补助金大大增强了UBC现有的快速制造基础设施。在技术方面，我们的目标是开发可靠的快速制造工艺的平面和平面外阵列的微机电结构，定义在大面积（相比，目前的模具尺寸）和柔性基板上。重点将主要放在聚合物技术上，而更长远的目标是将与陶瓷基化合物的微加工相关的加工模块以及与有机电子器件的集成结合起来。平面内耦合的可移动微结构的2D阵列将利用大面积属性来在机械域中产生等效的信号处理功能（滤波），类似于晶格滤波器或模拟细胞自动机。机电耦合为机械滤波器的特定功能增加了可编程性，目标应用是实时频谱分析领域。柔性基板的特点将在第二个目标应用中得到利用，其中聚合物CMUT（电容式微机械超声换能器）元件的2D阵列，移动到平面外，将成为构建用于癌症检测的内窥镜超声成像系统的关键元件。 胰腺癌是一种常见的高致命性疾病，只有在早期完全切除才能获得长期生存的机会。内窥镜超声已被证明在检测胰腺肿瘤方面具有最高的灵敏度，但换能器头的性能仍有待改进。 此外，2D聚合物CMUT阵列能够实现低成本的3D超声成像系统，提供新的有价值的见解。短的理论-实验周期对HQP很有吸引力，并有望带来快速的进化和更深入的洞察力，对他们未来的职业生涯产生明显的影响。

This research program focuses on the synergic combination of innovations at the theoretical level and their implementation in low-cost microstructure arrays fabricated through rapid micromachining (e.g. maskless grayscale lithography, inkjet microprinting, laser micromachining). It complements a recently awarded major CFI national grant that strongly enhances the existing infrastructure for rapid fabrication at UBC. On the technology side, the objective is to develop reliable rapid fabrication processes for in-plane and out-of-plane arrays of microelectromechanical structures, defined on large areas (compared to present die sizes) and on flexible substrates. The focus will be mainly on polymer-based technologies, while a longer objective is to incorporate as well processing modules related to microfabrication of ceramic-based compounds, and integration with organic electronic devices. 2D arrays of in-plane, coupled movable microstructures will exploit the large area attribute for generating equivalent signal processing functions (filtering) in the mechanical domain, analogous to lattice filters or analog cellular automata. The electromechanical coupling adds programmability to the specific features of the mechanical filters, with target applications in the field of real-time spectrum analysis. The flexible substrate feature will be exploited in a second target application, where 2D arrays of polymer CMUT (Capacitive Micromachined Ultrasonic Transducer) elements, moving out-of-plane, will be the key element for building an endoscopic ultrasound imaging system for cancer detection. Pancreatic cancer is common and highly lethal, with the only chance of long-term survival depending on an early complete resection. Endoscopic ultrasound has already proven to have the highest sensitivity in detecting pancreatic tumors, but the performance of the transducer head can still be improved. Moreover, the 2D polymer CMUT array enables low-cost 3D ultrasound imaging systems, giving new valuable insights. The short theory - experiment cycle is attractive for HQPs, and promises to bring a fast pace of evolution and a deeper insight, with noticeable effects on their future career.