Fabrication, packaging and reliability of nano-electro-mechanical systems (NEMS) devices

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In recent years advanced technology allows manufacturing of nano-electro-mechanical systems (NEMS) device prototypes such as nano-probes used in signal processing and transmission in speed electronics. However, manufacturing of high precision NEMS devices with low contact resistance is a serious challenge in NEMS device engineering. Moreover, there are substantial challenges in their testing and packaging including integrating the NEMS chips into current micro-electro-mechanical-systems (MEMS). The proposed project aims to demonstrate that nano-bonded hybrid interconnections for instance using graphene with low contact resistance are competitive to copper, gold and silver micro-wire-bonded interconnections used in current NEMS and MEMS devices. The main output of this research is proposed to be a technology development for the NEMS device testing and packaging using hybrid such as graphene based interconnections for ultra-fast electronics and low interconnection resistance applications in health and communications. The rapid miniaturization of low-power, high-bandwidth devices has the potential to revolutionize health technologies, wireless communication and smart sensor systems. These nano and micro-electro-mechanical-systems (N/MEMS) can be used in a vast range of applications, from detecting and treating pathogens and tumors, to enabling embedded mobile internet services. The potential for disruptive innovation is great, but Canada’s health and communication sectors face a significant N/MEMS training gap. The N/MEMS-innovation network seeks to found an NSERC program focused on training students for N/MEMS careers in Canadian small and medium sized enterprises (SMEs) and large enterprises (LE). The proposed project has three key priorities: i) to develop cutting edge N/MEMS manufacturing, packaging, testing and reliability systems, processes and procedures with national and international collaborators as well as identified partners in health and communication technologies, all with access to the most advanced infrastructure; ii) to deliver these enabling technologies to Canada’s industry by training a future workforce of scientists, technicians, engineers, designers, managers and entrepreneurs; iii) to provide trainees with professional skills that are valued and required by industry, including project management, communication skills, and knowledge of intellectual property development and protection.